JPS5253672A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS5253672A JPS5253672A JP12923675A JP12923675A JPS5253672A JP S5253672 A JPS5253672 A JP S5253672A JP 12923675 A JP12923675 A JP 12923675A JP 12923675 A JP12923675 A JP 12923675A JP S5253672 A JPS5253672 A JP S5253672A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- grooves
- integration
- self
- scale
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Bipolar Transistors (AREA)
Abstract
PURPOSE: To make photoresist treatment in a self-aligning system, achieve the reduction in the number of steps and increase the scale of integration by forming V-form grooves in crystal face (100) by anisotropic etching and using the grooves by filling oxide therein.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12923675A JPS5253672A (en) | 1975-10-29 | 1975-10-29 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12923675A JPS5253672A (en) | 1975-10-29 | 1975-10-29 | Semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5253672A true JPS5253672A (en) | 1977-04-30 |
Family
ID=15004532
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12923675A Pending JPS5253672A (en) | 1975-10-29 | 1975-10-29 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5253672A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5648168A (en) * | 1979-09-28 | 1981-05-01 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Semiconductor integrated circuit unit and its preparation |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS495199A (en) * | 1971-03-25 | 1974-01-17 |
-
1975
- 1975-10-29 JP JP12923675A patent/JPS5253672A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS495199A (en) * | 1971-03-25 | 1974-01-17 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5648168A (en) * | 1979-09-28 | 1981-05-01 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Semiconductor integrated circuit unit and its preparation |
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