JPS5253672A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS5253672A
JPS5253672A JP12923675A JP12923675A JPS5253672A JP S5253672 A JPS5253672 A JP S5253672A JP 12923675 A JP12923675 A JP 12923675A JP 12923675 A JP12923675 A JP 12923675A JP S5253672 A JPS5253672 A JP S5253672A
Authority
JP
Japan
Prior art keywords
semiconductor device
grooves
integration
self
scale
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12923675A
Other languages
Japanese (ja)
Inventor
Kaoru Niino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12923675A priority Critical patent/JPS5253672A/en
Publication of JPS5253672A publication Critical patent/JPS5253672A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To make photoresist treatment in a self-aligning system, achieve the reduction in the number of steps and increase the scale of integration by forming V-form grooves in crystal face (100) by anisotropic etching and using the grooves by filling oxide therein.
COPYRIGHT: (C)1977,JPO&Japio
JP12923675A 1975-10-29 1975-10-29 Semiconductor device Pending JPS5253672A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12923675A JPS5253672A (en) 1975-10-29 1975-10-29 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12923675A JPS5253672A (en) 1975-10-29 1975-10-29 Semiconductor device

Publications (1)

Publication Number Publication Date
JPS5253672A true JPS5253672A (en) 1977-04-30

Family

ID=15004532

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12923675A Pending JPS5253672A (en) 1975-10-29 1975-10-29 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS5253672A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5648168A (en) * 1979-09-28 1981-05-01 Chiyou Lsi Gijutsu Kenkyu Kumiai Semiconductor integrated circuit unit and its preparation

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS495199A (en) * 1971-03-25 1974-01-17

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS495199A (en) * 1971-03-25 1974-01-17

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5648168A (en) * 1979-09-28 1981-05-01 Chiyou Lsi Gijutsu Kenkyu Kumiai Semiconductor integrated circuit unit and its preparation

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