JPS5249879A - Inspection device for photoelectric defect inspection apparatus - Google Patents

Inspection device for photoelectric defect inspection apparatus

Info

Publication number
JPS5249879A
JPS5249879A JP12577775A JP12577775A JPS5249879A JP S5249879 A JPS5249879 A JP S5249879A JP 12577775 A JP12577775 A JP 12577775A JP 12577775 A JP12577775 A JP 12577775A JP S5249879 A JPS5249879 A JP S5249879A
Authority
JP
Japan
Prior art keywords
inspection
photoelectric
inspection apparatus
inspection device
defect inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12577775A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5313986B2 (cg-RX-API-DMAC7.html
Inventor
Katsuumi Koyanagi
Kenji Ogino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Tateisi Electronics Co
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tateisi Electronics Co, Omron Tateisi Electronics Co filed Critical Tateisi Electronics Co
Priority to JP12577775A priority Critical patent/JPS5249879A/ja
Publication of JPS5249879A publication Critical patent/JPS5249879A/ja
Publication of JPS5313986B2 publication Critical patent/JPS5313986B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP12577775A 1975-10-18 1975-10-18 Inspection device for photoelectric defect inspection apparatus Granted JPS5249879A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12577775A JPS5249879A (en) 1975-10-18 1975-10-18 Inspection device for photoelectric defect inspection apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12577775A JPS5249879A (en) 1975-10-18 1975-10-18 Inspection device for photoelectric defect inspection apparatus

Publications (2)

Publication Number Publication Date
JPS5249879A true JPS5249879A (en) 1977-04-21
JPS5313986B2 JPS5313986B2 (cg-RX-API-DMAC7.html) 1978-05-13

Family

ID=14918570

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12577775A Granted JPS5249879A (en) 1975-10-18 1975-10-18 Inspection device for photoelectric defect inspection apparatus

Country Status (1)

Country Link
JP (1) JPS5249879A (cg-RX-API-DMAC7.html)

Also Published As

Publication number Publication date
JPS5313986B2 (cg-RX-API-DMAC7.html) 1978-05-13

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