JPS5245986A - Pressure sensor mechanism - Google Patents

Pressure sensor mechanism

Info

Publication number
JPS5245986A
JPS5245986A JP11947576A JP11947576A JPS5245986A JP S5245986 A JPS5245986 A JP S5245986A JP 11947576 A JP11947576 A JP 11947576A JP 11947576 A JP11947576 A JP 11947576A JP S5245986 A JPS5245986 A JP S5245986A
Authority
JP
Japan
Prior art keywords
pressure sensor
sensor mechanism
pressure
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11947576A
Other languages
Japanese (ja)
Other versions
JPS6032993B2 (en
Inventor
Efu Maashiyaru Jieemusu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell Inc
Original Assignee
Honeywell Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Inc filed Critical Honeywell Inc
Publication of JPS5245986A publication Critical patent/JPS5245986A/en
Publication of JPS6032993B2 publication Critical patent/JPS6032993B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R23/00—Transducers other than those covered by groups H04R9/00 - H04R21/00
    • H04R23/006—Transducers other than those covered by groups H04R9/00 - H04R21/00 using solid state devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
    • G01L1/2293—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges of the semi-conductor type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/84—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by variation of applied mechanical force, e.g. of pressure

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Analytical Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Signal Processing (AREA)
  • Acoustics & Sound (AREA)
  • Computer Hardware Design (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP11947576A 1975-10-06 1976-10-06 Semiconductor stress sensor and its manufacturing method Expired JPS6032993B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US61986675A 1975-10-06 1975-10-06
US619866 1984-06-12

Publications (2)

Publication Number Publication Date
JPS5245986A true JPS5245986A (en) 1977-04-12
JPS6032993B2 JPS6032993B2 (en) 1985-07-31

Family

ID=24483643

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11947576A Expired JPS6032993B2 (en) 1975-10-06 1976-10-06 Semiconductor stress sensor and its manufacturing method

Country Status (7)

Country Link
JP (1) JPS6032993B2 (en)
CA (1) CA1088664A (en)
DE (1) DE2644638A1 (en)
FR (1) FR2327528A1 (en)
GB (1) GB1558815A (en)
IT (1) IT1073874B (en)
SE (1) SE414096B (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5551714A (en) * 1978-10-12 1980-04-15 Wacker Chemie Gmbh Method of heightening bulk density of silicon dioxide with at least 50m2*g surface area by low pressure on filter surface
JPS55102277A (en) * 1979-01-29 1980-08-05 Toshiba Corp Semiconductor pressure converter
JPS55112864U (en) * 1979-02-02 1980-08-08
JP2000340805A (en) * 1999-04-19 2000-12-08 Motorola Inc Electronic part and manufacture

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59117271A (en) * 1982-12-24 1984-07-06 Hitachi Ltd Semiconductor device having pressure sensing element and manufacture thereof
JPS59136977A (en) * 1983-01-26 1984-08-06 Hitachi Ltd Pressure sensitive semiconductor device and manufacture thereof
JP3344138B2 (en) * 1995-01-30 2002-11-11 株式会社日立製作所 Semiconductor composite sensor
DE102011006332A1 (en) * 2011-03-29 2012-10-04 Robert Bosch Gmbh Method for producing monocrystalline piezoresistors

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3819431A (en) * 1971-10-05 1974-06-25 Kulite Semiconductor Products Method of making transducers employing integral protective coatings and supports
GB1399988A (en) * 1972-10-02 1975-07-02 Motorola Inc Silicon pressure sensor
GB1362616A (en) * 1973-03-21 1974-08-07 Welwyn Electric Ltd Semiconductor strain measuring device
US3902926A (en) * 1974-02-21 1975-09-02 Signetics Corp Method of making an ion implanted resistor

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5551714A (en) * 1978-10-12 1980-04-15 Wacker Chemie Gmbh Method of heightening bulk density of silicon dioxide with at least 50m2*g surface area by low pressure on filter surface
JPS5823330B2 (en) * 1978-10-12 1983-05-14 ワツカ−・ヒエミ−・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング A method of increasing the bulk density of silicon dioxide having a surface area of at least 50 m↑2/g at a filter surface by low pressure.
JPS55102277A (en) * 1979-01-29 1980-08-05 Toshiba Corp Semiconductor pressure converter
JPS55112864U (en) * 1979-02-02 1980-08-08
JP2000340805A (en) * 1999-04-19 2000-12-08 Motorola Inc Electronic part and manufacture

Also Published As

Publication number Publication date
FR2327528B1 (en) 1982-05-21
JPS6032993B2 (en) 1985-07-31
SE414096B (en) 1980-07-07
CA1088664A (en) 1980-10-28
IT1073874B (en) 1985-04-17
DE2644638C2 (en) 1988-01-21
FR2327528A1 (en) 1977-05-06
DE2644638A1 (en) 1977-04-07
GB1558815A (en) 1980-01-09
SE7611020L (en) 1977-04-07

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