JPS5243355A - Test data transfer device for electric particle line eqipment - Google Patents

Test data transfer device for electric particle line eqipment

Info

Publication number
JPS5243355A
JPS5243355A JP50118562A JP11856275A JPS5243355A JP S5243355 A JPS5243355 A JP S5243355A JP 50118562 A JP50118562 A JP 50118562A JP 11856275 A JP11856275 A JP 11856275A JP S5243355 A JPS5243355 A JP S5243355A
Authority
JP
Japan
Prior art keywords
test data
data transfer
eqipment
transfer device
particle line
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50118562A
Other languages
English (en)
Japanese (ja)
Other versions
JPS561745B2 (enrdf_load_stackoverflow
Inventor
Takashi Shimatani
Takao Namae
Kazuo Ishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP50118562A priority Critical patent/JPS5243355A/ja
Priority to GB14694/76A priority patent/GB1560722A/en
Priority to US05/678,770 priority patent/US4020343A/en
Priority to FR7611920A priority patent/FR2309034A1/fr
Publication of JPS5243355A publication Critical patent/JPS5243355A/ja
Publication of JPS561745B2 publication Critical patent/JPS561745B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
JP50118562A 1975-04-23 1975-10-01 Test data transfer device for electric particle line eqipment Granted JPS5243355A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP50118562A JPS5243355A (en) 1975-10-01 1975-10-01 Test data transfer device for electric particle line eqipment
GB14694/76A GB1560722A (en) 1975-04-23 1976-04-09 Scanning electron microscope
US05/678,770 US4020343A (en) 1975-04-23 1976-04-21 Scanning electron device
FR7611920A FR2309034A1 (fr) 1975-04-23 1976-04-22 Microscope electronique a balayage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50118562A JPS5243355A (en) 1975-10-01 1975-10-01 Test data transfer device for electric particle line eqipment

Publications (2)

Publication Number Publication Date
JPS5243355A true JPS5243355A (en) 1977-04-05
JPS561745B2 JPS561745B2 (enrdf_load_stackoverflow) 1981-01-14

Family

ID=14739657

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50118562A Granted JPS5243355A (en) 1975-04-23 1975-10-01 Test data transfer device for electric particle line eqipment

Country Status (1)

Country Link
JP (1) JPS5243355A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59148254A (ja) * 1983-02-10 1984-08-24 Jeol Ltd 走査電子顕微鏡等の試料移動装置
JPS63228556A (ja) * 1987-03-18 1988-09-22 Hitachi Ltd 走査電子顕微鏡およびその試料台移動方法
JPH02174045A (ja) * 1988-12-27 1990-07-05 Hitachi Ltd 試料台移動装置およびこれを用いた電子顕微鏡
JPH02174046A (ja) * 1988-12-27 1990-07-05 Hitachi Ltd 電子顕微鏡およびこれに用いる試料微動装置の制御方法
JP2017084483A (ja) * 2015-10-23 2017-05-18 日本電子株式会社 キャリブレーション方法および荷電粒子線装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5341062A (en) * 1977-05-12 1978-04-14 Nippon Fuirutaa Kk Purifying method and apparatus for drainage by microorganism

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5341062A (en) * 1977-05-12 1978-04-14 Nippon Fuirutaa Kk Purifying method and apparatus for drainage by microorganism

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59148254A (ja) * 1983-02-10 1984-08-24 Jeol Ltd 走査電子顕微鏡等の試料移動装置
JPS63228556A (ja) * 1987-03-18 1988-09-22 Hitachi Ltd 走査電子顕微鏡およびその試料台移動方法
JPH02174045A (ja) * 1988-12-27 1990-07-05 Hitachi Ltd 試料台移動装置およびこれを用いた電子顕微鏡
JPH02174046A (ja) * 1988-12-27 1990-07-05 Hitachi Ltd 電子顕微鏡およびこれに用いる試料微動装置の制御方法
JP2017084483A (ja) * 2015-10-23 2017-05-18 日本電子株式会社 キャリブレーション方法および荷電粒子線装置
US10014156B2 (en) 2015-10-23 2018-07-03 Jeol Ltd. Calibration method and charged particle beam system

Also Published As

Publication number Publication date
JPS561745B2 (enrdf_load_stackoverflow) 1981-01-14

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