JPS524184A - Manufacturing method of semiconductor resistors - Google Patents
Manufacturing method of semiconductor resistorsInfo
- Publication number
- JPS524184A JPS524184A JP7158275A JP7158275A JPS524184A JP S524184 A JPS524184 A JP S524184A JP 7158275 A JP7158275 A JP 7158275A JP 7158275 A JP7158275 A JP 7158275A JP S524184 A JPS524184 A JP S524184A
- Authority
- JP
- Japan
- Prior art keywords
- manufacturing
- ion doping
- semiconductor resistors
- resistors
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Semiconductor Integrated Circuits (AREA)
Abstract
PURPOSE: By properly controlling the ion doping energy and the amount of ion doping, the ion doping resistance is obtained equivalent to the noise level of thermal diffusion resistor.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7158275A JPS524184A (en) | 1975-06-12 | 1975-06-12 | Manufacturing method of semiconductor resistors |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7158275A JPS524184A (en) | 1975-06-12 | 1975-06-12 | Manufacturing method of semiconductor resistors |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57181693A Division JPS58190052A (en) | 1982-10-16 | 1982-10-16 | Preparation of semiconductor resistor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS524184A true JPS524184A (en) | 1977-01-13 |
Family
ID=13464822
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7158275A Pending JPS524184A (en) | 1975-06-12 | 1975-06-12 | Manufacturing method of semiconductor resistors |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS524184A (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4844064A (en) * | 1971-10-08 | 1973-06-25 | ||
JPS5025184A (en) * | 1973-01-24 | 1975-03-17 |
-
1975
- 1975-06-12 JP JP7158275A patent/JPS524184A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4844064A (en) * | 1971-10-08 | 1973-06-25 | ||
JPS5025184A (en) * | 1973-01-24 | 1975-03-17 |
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