JPS5241176A - Crucible for evaporation source - Google Patents

Crucible for evaporation source

Info

Publication number
JPS5241176A
JPS5241176A JP11635975A JP11635975A JPS5241176A JP S5241176 A JPS5241176 A JP S5241176A JP 11635975 A JP11635975 A JP 11635975A JP 11635975 A JP11635975 A JP 11635975A JP S5241176 A JPS5241176 A JP S5241176A
Authority
JP
Japan
Prior art keywords
crucible
evaporation source
scratches
defects
generation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11635975A
Other languages
English (en)
Inventor
Akio Kotabe
Shizuo Shoji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP11635975A priority Critical patent/JPS5241176A/ja
Publication of JPS5241176A publication Critical patent/JPS5241176A/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP11635975A 1975-09-29 1975-09-29 Crucible for evaporation source Pending JPS5241176A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11635975A JPS5241176A (en) 1975-09-29 1975-09-29 Crucible for evaporation source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11635975A JPS5241176A (en) 1975-09-29 1975-09-29 Crucible for evaporation source

Publications (1)

Publication Number Publication Date
JPS5241176A true JPS5241176A (en) 1977-03-30

Family

ID=14684997

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11635975A Pending JPS5241176A (en) 1975-09-29 1975-09-29 Crucible for evaporation source

Country Status (1)

Country Link
JP (1) JPS5241176A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5322858U (ja) * 1976-08-03 1978-02-25

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3245674A (en) * 1960-04-25 1966-04-12 Nat Res Corp Crucible coated with reaction product of aluminum and boron nitride coating
JPS5122364A (en) * 1974-08-19 1976-02-23 Suwa Seikosha Kk Shinkujochakuyobootono kozo

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3245674A (en) * 1960-04-25 1966-04-12 Nat Res Corp Crucible coated with reaction product of aluminum and boron nitride coating
JPS5122364A (en) * 1974-08-19 1976-02-23 Suwa Seikosha Kk Shinkujochakuyobootono kozo

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5322858U (ja) * 1976-08-03 1978-02-25

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