JPS5240300A - Collector of charged particle beam device - Google Patents

Collector of charged particle beam device

Info

Publication number
JPS5240300A
JPS5240300A JP11576475A JP11576475A JPS5240300A JP S5240300 A JPS5240300 A JP S5240300A JP 11576475 A JP11576475 A JP 11576475A JP 11576475 A JP11576475 A JP 11576475A JP S5240300 A JPS5240300 A JP S5240300A
Authority
JP
Japan
Prior art keywords
charged particle
particle beam
collector
beam device
collector part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11576475A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5634080B2 (enrdf_load_stackoverflow
Inventor
Masahiro Tano
Fumiharu Yabunaka
Masaru Manabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP11576475A priority Critical patent/JPS5240300A/ja
Publication of JPS5240300A publication Critical patent/JPS5240300A/ja
Publication of JPS5634080B2 publication Critical patent/JPS5634080B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrostatic Separation (AREA)
JP11576475A 1975-09-25 1975-09-25 Collector of charged particle beam device Granted JPS5240300A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11576475A JPS5240300A (en) 1975-09-25 1975-09-25 Collector of charged particle beam device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11576475A JPS5240300A (en) 1975-09-25 1975-09-25 Collector of charged particle beam device

Publications (2)

Publication Number Publication Date
JPS5240300A true JPS5240300A (en) 1977-03-29
JPS5634080B2 JPS5634080B2 (enrdf_load_stackoverflow) 1981-08-07

Family

ID=14670457

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11576475A Granted JPS5240300A (en) 1975-09-25 1975-09-25 Collector of charged particle beam device

Country Status (1)

Country Link
JP (1) JPS5240300A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54124098A (en) * 1978-03-20 1979-09-26 Toray Ind Inc Preparation of polyester
JPS5665019A (en) * 1979-11-02 1981-06-02 Toray Ind Inc Production of polyester

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS507000A (enrdf_load_stackoverflow) * 1973-05-24 1975-01-24

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS507000A (enrdf_load_stackoverflow) * 1973-05-24 1975-01-24

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54124098A (en) * 1978-03-20 1979-09-26 Toray Ind Inc Preparation of polyester
JPS5665019A (en) * 1979-11-02 1981-06-02 Toray Ind Inc Production of polyester

Also Published As

Publication number Publication date
JPS5634080B2 (enrdf_load_stackoverflow) 1981-08-07

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