JPS5238420B2 - - Google Patents

Info

Publication number
JPS5238420B2
JPS5238420B2 JP7612873A JP7612873A JPS5238420B2 JP S5238420 B2 JPS5238420 B2 JP S5238420B2 JP 7612873 A JP7612873 A JP 7612873A JP 7612873 A JP7612873 A JP 7612873A JP S5238420 B2 JPS5238420 B2 JP S5238420B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7612873A
Other languages
Japanese (ja)
Other versions
JPS5026535A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7612873A priority Critical patent/JPS5238420B2/ja
Publication of JPS5026535A publication Critical patent/JPS5026535A/ja
Publication of JPS5238420B2 publication Critical patent/JPS5238420B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Automatic Focus Adjustment (AREA)
  • Focusing (AREA)
  • Lens Barrels (AREA)
JP7612873A 1973-07-07 1973-07-07 Expired JPS5238420B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7612873A JPS5238420B2 (enrdf_load_stackoverflow) 1973-07-07 1973-07-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7612873A JPS5238420B2 (enrdf_load_stackoverflow) 1973-07-07 1973-07-07

Publications (2)

Publication Number Publication Date
JPS5026535A JPS5026535A (enrdf_load_stackoverflow) 1975-03-19
JPS5238420B2 true JPS5238420B2 (enrdf_load_stackoverflow) 1977-09-29

Family

ID=13596282

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7612873A Expired JPS5238420B2 (enrdf_load_stackoverflow) 1973-07-07 1973-07-07

Country Status (1)

Country Link
JP (1) JPS5238420B2 (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56105344U (enrdf_load_stackoverflow) * 1980-01-18 1981-08-17
JPS56102814A (en) * 1980-01-18 1981-08-17 Fuji Electric Co Ltd Automatic focusing device for microscope
JPS5842807U (ja) * 1981-09-14 1983-03-22 凸版印刷株式会社 パタ−ン被検査体
JPS58120106A (ja) * 1982-01-12 1983-07-16 Hitachi Ltd 半導体ウエハの外観検査装置

Also Published As

Publication number Publication date
JPS5026535A (enrdf_load_stackoverflow) 1975-03-19

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