JPS523795B1 - - Google Patents
Info
- Publication number
- JPS523795B1 JPS523795B1 JP47056114A JP5611472A JPS523795B1 JP S523795 B1 JPS523795 B1 JP S523795B1 JP 47056114 A JP47056114 A JP 47056114A JP 5611472 A JP5611472 A JP 5611472A JP S523795 B1 JPS523795 B1 JP S523795B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P50/00—Etching of wafers, substrates or parts of devices
- H10P50/69—Etching of wafers, substrates or parts of devices using masks for semiconductor materials
- H10P50/691—Etching of wafers, substrates or parts of devices using masks for semiconductor materials for Group V materials or Group III-V materials
- H10P50/692—Etching of wafers, substrates or parts of devices using masks for semiconductor materials for Group V materials or Group III-V materials characterised by their composition, e.g. multilayer masks or materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/02—Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
- H01J29/10—Screens on or from which an image or pattern is formed, picked up, converted or stored
- H01J29/36—Photoelectric screens; Charge-storage screens
- H01J29/39—Charge-storage screens
- H01J29/45—Charge-storage screens exhibiting internal electric effects caused by electromagnetic radiation, e.g. photoconductive screen, photodielectric screen, photovoltaic screen
- H01J29/451—Charge-storage screens exhibiting internal electric effects caused by electromagnetic radiation, e.g. photoconductive screen, photodielectric screen, photovoltaic screen with photosensitive junctions
- H01J29/453—Charge-storage screens exhibiting internal electric effects caused by electromagnetic radiation, e.g. photoconductive screen, photodielectric screen, photovoltaic screen with photosensitive junctions provided with diode arrays
- H01J29/455—Charge-storage screens exhibiting internal electric effects caused by electromagnetic radiation, e.g. photoconductive screen, photodielectric screen, photovoltaic screen with photosensitive junctions provided with diode arrays formed on a silicon substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/20—Manufacture of screens on or from which an image or pattern is formed, picked up, converted or stored; Applying coatings to the vessel
- H01J9/233—Manufacture of photoelectric screens or charge-storage screens
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D99/00—Subject matter not provided for in other groups of this subclass
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/942—Masking
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/977—Thinning or removal of substrate
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Weting (AREA)
- ing And Chemical Polishing (AREA)
- Catalysts (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Low-Molecular Organic Synthesis Reactions Using Catalysts (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US15034571A | 1971-06-07 | 1971-06-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS487625A JPS487625A (https=) | 1973-01-31 |
| JPS523795B1 true JPS523795B1 (https=) | 1977-01-29 |
Family
ID=22534114
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47056114A Pending JPS523795B1 (https=) | 1971-06-07 | 1972-06-07 |
Country Status (7)
| Country | Link |
|---|---|
| US (3) | US3701705A (https=) |
| JP (1) | JPS523795B1 (https=) |
| CA (1) | CA930654A (https=) |
| DE (1) | DE2226237C3 (https=) |
| FR (1) | FR2141205A5 (https=) |
| GB (1) | GB1389106A (https=) |
| IT (1) | IT959057B (https=) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3929551A (en) * | 1974-07-11 | 1975-12-30 | Buckbee Mears Co | Sealing apparatus for continuous moving web |
| US3954940A (en) * | 1974-11-04 | 1976-05-04 | Mcdonnell Douglas Corporation | Process for surface work strain relief of electrooptic crystals |
| US3953265A (en) * | 1975-04-28 | 1976-04-27 | International Business Machines Corporation | Meniscus-contained method of handling fluids in the manufacture of semiconductor wafers |
| US4064186A (en) * | 1975-09-23 | 1977-12-20 | Union Carbide Corporation | Hydrogenation of styrene oxide to produce 2-phenylethanol |
| US4011144A (en) * | 1975-12-22 | 1977-03-08 | Western Electric Company | Methods of forming metallization patterns on beam lead semiconductor devices |
| JPS5834449B2 (ja) * | 1976-09-01 | 1983-07-27 | 東ソー株式会社 | β−フエニルエチルアルコ−ルの製造法 |
| US4085038A (en) * | 1976-12-15 | 1978-04-18 | Western Electric Co., Inc. | Methods of and apparatus for sorting parts of a separated article |
| US4384919A (en) * | 1978-11-13 | 1983-05-24 | Sperry Corporation | Method of making x-ray masks |
| US4222815A (en) * | 1979-06-04 | 1980-09-16 | The Babcock & Wilcox Company | Isotropic etching of silicon strain gages |
| NL8004265A (nl) * | 1979-07-25 | 1981-01-27 | Rca Corp | Werkwijze voor het vervaardigen van een afbeeld- inrichting. |
| US4268374A (en) * | 1979-08-09 | 1981-05-19 | Bell Telephone Laboratories, Incorporated | High capacity sputter-etching apparatus |
| US4585513A (en) * | 1985-01-30 | 1986-04-29 | Rca Corporation | Method for removing glass support from semiconductor device |
| US4671850A (en) * | 1985-08-16 | 1987-06-09 | Micronix Corporation | Mask using polyimide to support a patterned x-ray opaque layer |
| US5127984A (en) * | 1991-05-02 | 1992-07-07 | Avantek, Inc. | Rapid wafer thinning process |
| DE4202194C2 (de) * | 1992-01-28 | 1996-09-19 | Fairchild Convac Gmbh Geraete | Verfahren und Vorrichtung zum partiellen Entfernen von dünnen Schichten von einem Substrat |
| KR101232181B1 (ko) * | 2010-02-03 | 2013-02-12 | 엘지디스플레이 주식회사 | 마스크 어셈블리 |
-
1971
- 1971-06-07 US US150345A patent/US3701705A/en not_active Expired - Lifetime
- 1971-12-16 CA CA130289A patent/CA930654A/en not_active Expired
-
1972
- 1972-05-30 DE DE2226237A patent/DE2226237C3/de not_active Expired
- 1972-06-01 GB GB2561072A patent/GB1389106A/en not_active Expired
- 1972-06-05 IT IT68772/72A patent/IT959057B/it active
- 1972-06-06 FR FR7220283A patent/FR2141205A5/fr not_active Expired
- 1972-06-07 JP JP47056114A patent/JPS523795B1/ja active Pending
- 1972-08-15 US US00280905A patent/US3823048A/en not_active Expired - Lifetime
- 1972-08-16 US US00281261A patent/US3841930A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| IT959057B (it) | 1973-11-10 |
| FR2141205A5 (https=) | 1973-01-19 |
| US3823048A (en) | 1974-07-09 |
| US3701705A (en) | 1972-10-31 |
| US3841930A (en) | 1974-10-15 |
| CA930654A (en) | 1973-07-24 |
| DE2226237A1 (de) | 1973-01-04 |
| JPS487625A (https=) | 1973-01-31 |
| GB1389106A (en) | 1975-04-03 |
| DE2226237B2 (de) | 1978-10-05 |
| DE2226237C3 (de) | 1979-06-07 |