JPS5236986U - - Google Patents
Info
- Publication number
- JPS5236986U JPS5236986U JP12401975U JP12401975U JPS5236986U JP S5236986 U JPS5236986 U JP S5236986U JP 12401975 U JP12401975 U JP 12401975U JP 12401975 U JP12401975 U JP 12401975U JP S5236986 U JPS5236986 U JP S5236986U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Sampling And Sample Adjustment (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12401975U JPS5435114Y2 (en:Method) | 1975-09-09 | 1975-09-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12401975U JPS5435114Y2 (en:Method) | 1975-09-09 | 1975-09-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5236986U true JPS5236986U (en:Method) | 1977-03-16 |
| JPS5435114Y2 JPS5435114Y2 (en:Method) | 1979-10-25 |
Family
ID=28604557
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12401975U Expired JPS5435114Y2 (en:Method) | 1975-09-09 | 1975-09-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5435114Y2 (en:Method) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62169328A (ja) * | 1986-01-21 | 1987-07-25 | Toshiba Mach Co Ltd | 基板交換装置 |
| JPS62169327A (ja) * | 1986-01-21 | 1987-07-25 | Toshiba Mach Co Ltd | 基板交換装置 |
-
1975
- 1975-09-09 JP JP12401975U patent/JPS5435114Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62169328A (ja) * | 1986-01-21 | 1987-07-25 | Toshiba Mach Co Ltd | 基板交換装置 |
| JPS62169327A (ja) * | 1986-01-21 | 1987-07-25 | Toshiba Mach Co Ltd | 基板交換装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5435114Y2 (en:Method) | 1979-10-25 |