JPS5435114Y2 - - Google Patents
Info
- Publication number
- JPS5435114Y2 JPS5435114Y2 JP12401975U JP12401975U JPS5435114Y2 JP S5435114 Y2 JPS5435114 Y2 JP S5435114Y2 JP 12401975 U JP12401975 U JP 12401975U JP 12401975 U JP12401975 U JP 12401975U JP S5435114 Y2 JPS5435114 Y2 JP S5435114Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Sampling And Sample Adjustment (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12401975U JPS5435114Y2 (en:Method) | 1975-09-09 | 1975-09-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12401975U JPS5435114Y2 (en:Method) | 1975-09-09 | 1975-09-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5236986U JPS5236986U (en:Method) | 1977-03-16 |
| JPS5435114Y2 true JPS5435114Y2 (en:Method) | 1979-10-25 |
Family
ID=28604557
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12401975U Expired JPS5435114Y2 (en:Method) | 1975-09-09 | 1975-09-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5435114Y2 (en:Method) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0638393B2 (ja) * | 1986-01-21 | 1994-05-18 | 東芝機械株式会社 | 基板交換装置 |
| JPH0624182B2 (ja) * | 1986-01-21 | 1994-03-30 | 東芝機械株式会社 | 基板交換装置 |
-
1975
- 1975-09-09 JP JP12401975U patent/JPS5435114Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5236986U (en:Method) | 1977-03-16 |