JPS5236240B2 - - Google Patents
Info
- Publication number
- JPS5236240B2 JPS5236240B2 JP5651272A JP5651272A JPS5236240B2 JP S5236240 B2 JPS5236240 B2 JP S5236240B2 JP 5651272 A JP5651272 A JP 5651272A JP 5651272 A JP5651272 A JP 5651272A JP S5236240 B2 JPS5236240 B2 JP S5236240B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Particle Accelerators (AREA)
- Welding Or Cutting Using Electron Beams (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5651272A JPS5236240B2 (https=) | 1972-06-08 | 1972-06-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5651272A JPS5236240B2 (https=) | 1972-06-08 | 1972-06-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4915899A JPS4915899A (https=) | 1974-02-12 |
| JPS5236240B2 true JPS5236240B2 (https=) | 1977-09-14 |
Family
ID=13029164
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5651272A Expired JPS5236240B2 (https=) | 1972-06-08 | 1972-06-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5236240B2 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61124125A (ja) * | 1984-11-20 | 1986-06-11 | Tokuda Seisakusho Ltd | プラズマ処理装置 |
| JPH0722843Y2 (ja) * | 1989-09-08 | 1995-05-24 | 日新ハイボルテージ株式会社 | プラズマスパッタ型負イオン源 |
-
1972
- 1972-06-08 JP JP5651272A patent/JPS5236240B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4915899A (https=) | 1974-02-12 |