JPS5236240B2 - - Google Patents

Info

Publication number
JPS5236240B2
JPS5236240B2 JP5651272A JP5651272A JPS5236240B2 JP S5236240 B2 JPS5236240 B2 JP S5236240B2 JP 5651272 A JP5651272 A JP 5651272A JP 5651272 A JP5651272 A JP 5651272A JP S5236240 B2 JPS5236240 B2 JP S5236240B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5651272A
Other languages
Japanese (ja)
Other versions
JPS4915899A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5651272A priority Critical patent/JPS5236240B2/ja
Publication of JPS4915899A publication Critical patent/JPS4915899A/ja
Publication of JPS5236240B2 publication Critical patent/JPS5236240B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
  • Electron Sources, Ion Sources (AREA)
JP5651272A 1972-06-08 1972-06-08 Expired JPS5236240B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5651272A JPS5236240B2 (enrdf_load_stackoverflow) 1972-06-08 1972-06-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5651272A JPS5236240B2 (enrdf_load_stackoverflow) 1972-06-08 1972-06-08

Publications (2)

Publication Number Publication Date
JPS4915899A JPS4915899A (enrdf_load_stackoverflow) 1974-02-12
JPS5236240B2 true JPS5236240B2 (enrdf_load_stackoverflow) 1977-09-14

Family

ID=13029164

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5651272A Expired JPS5236240B2 (enrdf_load_stackoverflow) 1972-06-08 1972-06-08

Country Status (1)

Country Link
JP (1) JPS5236240B2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61124125A (ja) * 1984-11-20 1986-06-11 Tokuda Seisakusho Ltd プラズマ処理装置
JPH0722843Y2 (ja) * 1989-09-08 1995-05-24 日新ハイボルテージ株式会社 プラズマスパッタ型負イオン源

Also Published As

Publication number Publication date
JPS4915899A (enrdf_load_stackoverflow) 1974-02-12

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