JPS5230073B2 - - Google Patents
Info
- Publication number
- JPS5230073B2 JPS5230073B2 JP6416473A JP6416473A JPS5230073B2 JP S5230073 B2 JPS5230073 B2 JP S5230073B2 JP 6416473 A JP6416473 A JP 6416473A JP 6416473 A JP6416473 A JP 6416473A JP S5230073 B2 JPS5230073 B2 JP S5230073B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Screw Conveyors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6416473A JPS5230073B2 (ja) | 1973-06-07 | 1973-06-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6416473A JPS5230073B2 (ja) | 1973-06-07 | 1973-06-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5014079A JPS5014079A (ja) | 1975-02-14 |
| JPS5230073B2 true JPS5230073B2 (ja) | 1977-08-05 |
Family
ID=13250138
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6416473A Expired JPS5230073B2 (ja) | 1973-06-07 | 1973-06-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5230073B2 (ja) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5633816A (en) * | 1979-08-29 | 1981-04-04 | Hitachi Ltd | Method and device for ion implantation |
-
1973
- 1973-06-07 JP JP6416473A patent/JPS5230073B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5014079A (ja) | 1975-02-14 |