JPS5229187A - Method for production of polycrystalline semiconductor film - Google Patents

Method for production of polycrystalline semiconductor film

Info

Publication number
JPS5229187A
JPS5229187A JP50104949A JP10494975A JPS5229187A JP S5229187 A JPS5229187 A JP S5229187A JP 50104949 A JP50104949 A JP 50104949A JP 10494975 A JP10494975 A JP 10494975A JP S5229187 A JPS5229187 A JP S5229187A
Authority
JP
Japan
Prior art keywords
production
semiconductor film
polycrystalline semiconductor
earch
photoelectric conversion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50104949A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5339317B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Sunao Matsubara
Tadashi Saito
Shigekazu Minagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP50104949A priority Critical patent/JPS5229187A/ja
Publication of JPS5229187A publication Critical patent/JPS5229187A/ja
Publication of JPS5339317B2 publication Critical patent/JPS5339317B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/301—AIII BV compounds, where A is Al, Ga, In or Tl and B is N, P, As, Sb or Bi

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Photovoltaic Devices (AREA)
JP50104949A 1975-09-01 1975-09-01 Method for production of polycrystalline semiconductor film Granted JPS5229187A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50104949A JPS5229187A (en) 1975-09-01 1975-09-01 Method for production of polycrystalline semiconductor film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50104949A JPS5229187A (en) 1975-09-01 1975-09-01 Method for production of polycrystalline semiconductor film

Publications (2)

Publication Number Publication Date
JPS5229187A true JPS5229187A (en) 1977-03-04
JPS5339317B2 JPS5339317B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1978-10-20

Family

ID=14394338

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50104949A Granted JPS5229187A (en) 1975-09-01 1975-09-01 Method for production of polycrystalline semiconductor film

Country Status (1)

Country Link
JP (1) JPS5229187A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS5339317B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1978-10-20

Similar Documents

Publication Publication Date Title
CA984942A (en) Approach to shingling of solar cells
CA1015435A (en) Photovoltaic cell with enhanced power output
JPS51113481A (en) Semiconductor device
AU2079176A (en) High efficiency selenium heterojunction solar cells
JPS51141587A (en) Method of producing solar battery
JPS51123779A (en) A hydrogen-oxygen drawing method using electrochemical photoelectric c ells
ZA754581B (en) Process for the production of electricity by means of an electrolyte-metal paste and device used to carry out this process
JPS5253162A (en) Method and device to convert nautral energy into power whenever usable
IL50723A0 (en) Manufacture of semiconductor ribbon & solar cells
JPS5310988A (en) Method of producing semiconductor solar battery
JPS5229187A (en) Method for production of polycrystalline semiconductor film
JPS5360171A (en) Electrode for silicon substrate and its production
JPS52110663A (en) Electronic clock
JPS51123588A (en) Manufacturing method of thin film solar battery
JPS5237786A (en) Process for production of photovoltaic element
JPS5237790A (en) Process for production of polycrystalline semiconductor films
JPS51128284A (en) Watch power source
GB1506160A (en) Solar cells
JPS5216989A (en) Process of semiconductor thin film
JPS5247693A (en) Solar cell power supply device
JPS51123558A (en) Manufacturing method of plate semiconductor
JPS51117589A (en) Glass sealed solar battery equipment and its manufacturing method
JPS5282086A (en) Method of producing silicon solar battery
AU489859B2 (en) Method of fabricating a photovoltaic cell
JPS5323869A (en) Hydrogen-generating apparatus by photoelectric conversion