Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filedfiledCritical
Priority to JP50104949ApriorityCriticalpatent/JPS5229187A/ja
Publication of JPS5229187ApublicationCriticalpatent/JPS5229187A/ja
Publication of JPS5339317B2publicationCriticalpatent/JPS5339317B2/ja
C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
C23C16/301—AIII BV compounds, where A is Al, Ga, In or Tl and B is N, P, As, Sb or Bi
Landscapes
Chemical & Material Sciences
(AREA)
Inorganic Chemistry
(AREA)
General Chemical & Material Sciences
(AREA)
Chemical Kinetics & Catalysis
(AREA)
Engineering & Computer Science
(AREA)
Materials Engineering
(AREA)
Mechanical Engineering
(AREA)
Metallurgy
(AREA)
Organic Chemistry
(AREA)
Chemical Vapour Deposition
(AREA)
Photovoltaic Devices
(AREA)
JP50104949A1975-09-011975-09-01Method for production of polycrystalline semiconductor film
GrantedJPS5229187A
(en)