JPS5228340A - Automatial focus adjustment unit for microscope - Google Patents
Automatial focus adjustment unit for microscopeInfo
- Publication number
- JPS5228340A JPS5228340A JP10406875A JP10406875A JPS5228340A JP S5228340 A JPS5228340 A JP S5228340A JP 10406875 A JP10406875 A JP 10406875A JP 10406875 A JP10406875 A JP 10406875A JP S5228340 A JPS5228340 A JP S5228340A
- Authority
- JP
- Japan
- Prior art keywords
- microscope
- focus adjustment
- automatial
- adjustment unit
- automatical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Focusing (AREA)
- Automatic Focus Adjustment (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10406875A JPS5228340A (en) | 1975-08-29 | 1975-08-29 | Automatial focus adjustment unit for microscope |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10406875A JPS5228340A (en) | 1975-08-29 | 1975-08-29 | Automatial focus adjustment unit for microscope |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5228340A true JPS5228340A (en) | 1977-03-03 |
Family
ID=14370836
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10406875A Pending JPS5228340A (en) | 1975-08-29 | 1975-08-29 | Automatial focus adjustment unit for microscope |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5228340A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS597321A (ja) * | 1982-07-02 | 1984-01-14 | Nippon Kogaku Kk <Nikon> | 高精度なピントずれ検出装置 |
US4829374A (en) * | 1986-11-17 | 1989-05-09 | Kanzaki Paper Manufacturing Co., Ltd. | Surface inspection apparatus |
US4897537A (en) * | 1987-03-30 | 1990-01-30 | Kanzaki Paper Manufacturing Co., Ltd. | Automatic focus adjusting system of microscope employed in surface inspection apparatus |
-
1975
- 1975-08-29 JP JP10406875A patent/JPS5228340A/ja active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS597321A (ja) * | 1982-07-02 | 1984-01-14 | Nippon Kogaku Kk <Nikon> | 高精度なピントずれ検出装置 |
JPH0380285B2 (ja) * | 1982-07-02 | 1991-12-24 | Nippon Kogaku Kk | |
US4829374A (en) * | 1986-11-17 | 1989-05-09 | Kanzaki Paper Manufacturing Co., Ltd. | Surface inspection apparatus |
US4897537A (en) * | 1987-03-30 | 1990-01-30 | Kanzaki Paper Manufacturing Co., Ltd. | Automatic focus adjusting system of microscope employed in surface inspection apparatus |
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