JPS522632B2 - - Google Patents

Info

Publication number
JPS522632B2
JPS522632B2 JP6463572A JP6463572A JPS522632B2 JP S522632 B2 JPS522632 B2 JP S522632B2 JP 6463572 A JP6463572 A JP 6463572A JP 6463572 A JP6463572 A JP 6463572A JP S522632 B2 JPS522632 B2 JP S522632B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6463572A
Other languages
Japanese (ja)
Other versions
JPS4925969A (cg-RX-API-DMAC10.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6463572A priority Critical patent/JPS522632B2/ja
Publication of JPS4925969A publication Critical patent/JPS4925969A/ja
Publication of JPS522632B2 publication Critical patent/JPS522632B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measuring Frequencies, Analyzing Spectra (AREA)
JP6463572A 1972-06-28 1972-06-28 Expired JPS522632B2 (cg-RX-API-DMAC10.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6463572A JPS522632B2 (cg-RX-API-DMAC10.html) 1972-06-28 1972-06-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6463572A JPS522632B2 (cg-RX-API-DMAC10.html) 1972-06-28 1972-06-28

Publications (2)

Publication Number Publication Date
JPS4925969A JPS4925969A (cg-RX-API-DMAC10.html) 1974-03-07
JPS522632B2 true JPS522632B2 (cg-RX-API-DMAC10.html) 1977-01-22

Family

ID=13263911

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6463572A Expired JPS522632B2 (cg-RX-API-DMAC10.html) 1972-06-28 1972-06-28

Country Status (1)

Country Link
JP (1) JPS522632B2 (cg-RX-API-DMAC10.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61222567A (ja) * 1985-01-28 1986-10-03 ザ　ビ−オ−シ−　グル−プ　インコ−ポレ−テツド 真空処理装置用ゲ−ト弁

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5176526A (cg-RX-API-DMAC10.html) * 1974-12-09 1976-07-02 Sanken Electric Co Ltd

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61222567A (ja) * 1985-01-28 1986-10-03 ザ　ビ−オ−シ−　グル−プ　インコ−ポレ−テツド 真空処理装置用ゲ−ト弁

Also Published As

Publication number Publication date
JPS4925969A (cg-RX-API-DMAC10.html) 1974-03-07

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