JPS522632B2 - - Google Patents

Info

Publication number
JPS522632B2
JPS522632B2 JP6463572A JP6463572A JPS522632B2 JP S522632 B2 JPS522632 B2 JP S522632B2 JP 6463572 A JP6463572 A JP 6463572A JP 6463572 A JP6463572 A JP 6463572A JP S522632 B2 JPS522632 B2 JP S522632B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6463572A
Other versions
JPS4925969A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6463572A priority Critical patent/JPS522632B2/ja
Publication of JPS4925969A publication Critical patent/JPS4925969A/ja
Publication of JPS522632B2 publication Critical patent/JPS522632B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measuring Frequencies, Analyzing Spectra (AREA)
JP6463572A 1972-06-28 1972-06-28 Expired JPS522632B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6463572A JPS522632B2 (ja) 1972-06-28 1972-06-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6463572A JPS522632B2 (ja) 1972-06-28 1972-06-28

Publications (2)

Publication Number Publication Date
JPS4925969A JPS4925969A (ja) 1974-03-07
JPS522632B2 true JPS522632B2 (ja) 1977-01-22

Family

ID=13263911

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6463572A Expired JPS522632B2 (ja) 1972-06-28 1972-06-28

Country Status (1)

Country Link
JP (1) JPS522632B2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61222567A (ja) * 1985-01-28 1986-10-03 ザ　ビ−オ−シ−　グル−プ　インコ−ポレ−テツド 真空処理装置用ゲ−ト弁

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5176526A (ja) * 1974-12-09 1976-07-02 Sanken Electric Co Ltd

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61222567A (ja) * 1985-01-28 1986-10-03 ザ　ビ−オ−シ−　グル−プ　インコ−ポレ−テツド 真空処理装置用ゲ−ト弁

Also Published As

Publication number Publication date
JPS4925969A (ja) 1974-03-07

Similar Documents

Publication Publication Date Title
FR2168046A5 (ja)
FR2183541B3 (ja)
CS162218B1 (ja)
BG20152A1 (ja)
BG18514A1 (ja)
BG19418A1 (ja)
BG20098A3 (ja)
BG20380A3 (ja)
BG20609A3 (ja)
BG21095A1 (ja)
BG21183A3 (ja)
BG21223A3 (ja)
BG21392A3 (ja)
BG22201A1 (ja)
BG22277A1 (ja)
BG25981A3 (ja)
CH380973A4 (ja)
CH559260A5 (ja)
CH559379A5 (ja)
CH559433A5 (ja)
CH559466A5 (ja)
CH560333A5 (ja)
CH560628A5 (ja)
CH560728A5 (ja)
CH560971A5 (ja)