JPS5223255A - Electron microscope - Google Patents

Electron microscope

Info

Publication number
JPS5223255A
JPS5223255A JP9859975A JP9859975A JPS5223255A JP S5223255 A JPS5223255 A JP S5223255A JP 9859975 A JP9859975 A JP 9859975A JP 9859975 A JP9859975 A JP 9859975A JP S5223255 A JPS5223255 A JP S5223255A
Authority
JP
Japan
Prior art keywords
electron microscope
distortion
make
projection lens
form large
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9859975A
Other languages
Japanese (ja)
Inventor
Shozo Kasai
Susumu Ozasa
Moriki Kubozoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9859975A priority Critical patent/JPS5223255A/en
Publication of JPS5223255A publication Critical patent/JPS5223255A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE: To make it possible to form large images without distortion with the use of a wise field, low distortion projection lens.
COPYRIGHT: (C)1977,JPO&Japio
JP9859975A 1975-08-15 1975-08-15 Electron microscope Pending JPS5223255A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9859975A JPS5223255A (en) 1975-08-15 1975-08-15 Electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9859975A JPS5223255A (en) 1975-08-15 1975-08-15 Electron microscope

Publications (1)

Publication Number Publication Date
JPS5223255A true JPS5223255A (en) 1977-02-22

Family

ID=14224078

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9859975A Pending JPS5223255A (en) 1975-08-15 1975-08-15 Electron microscope

Country Status (1)

Country Link
JP (1) JPS5223255A (en)

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