JPS51142958A - Electro-magnetic coil for electron lens - Google Patents
Electro-magnetic coil for electron lensInfo
- Publication number
- JPS51142958A JPS51142958A JP6654175A JP6654175A JPS51142958A JP S51142958 A JPS51142958 A JP S51142958A JP 6654175 A JP6654175 A JP 6654175A JP 6654175 A JP6654175 A JP 6654175A JP S51142958 A JPS51142958 A JP S51142958A
- Authority
- JP
- Japan
- Prior art keywords
- electro
- magnetic coil
- electron lens
- electron lenses
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Beam Exposure (AREA)
Abstract
PURPOSE: To enhance the efficiency of cooling electron lenses and to obtain electron lenses of small size.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6654175A JPS51142958A (en) | 1975-06-04 | 1975-06-04 | Electro-magnetic coil for electron lens |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6654175A JPS51142958A (en) | 1975-06-04 | 1975-06-04 | Electro-magnetic coil for electron lens |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51142958A true JPS51142958A (en) | 1976-12-08 |
Family
ID=13318854
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6654175A Pending JPS51142958A (en) | 1975-06-04 | 1975-06-04 | Electro-magnetic coil for electron lens |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51142958A (en) |
-
1975
- 1975-06-04 JP JP6654175A patent/JPS51142958A/en active Pending
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