JPS51142958A - Electro-magnetic coil for electron lens - Google Patents

Electro-magnetic coil for electron lens

Info

Publication number
JPS51142958A
JPS51142958A JP6654175A JP6654175A JPS51142958A JP S51142958 A JPS51142958 A JP S51142958A JP 6654175 A JP6654175 A JP 6654175A JP 6654175 A JP6654175 A JP 6654175A JP S51142958 A JPS51142958 A JP S51142958A
Authority
JP
Japan
Prior art keywords
electro
magnetic coil
electron lens
electron lenses
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6654175A
Other languages
Japanese (ja)
Inventor
Shozo Kasai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6654175A priority Critical patent/JPS51142958A/en
Publication of JPS51142958A publication Critical patent/JPS51142958A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: To enhance the efficiency of cooling electron lenses and to obtain electron lenses of small size.
COPYRIGHT: (C)1976,JPO&Japio
JP6654175A 1975-06-04 1975-06-04 Electro-magnetic coil for electron lens Pending JPS51142958A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6654175A JPS51142958A (en) 1975-06-04 1975-06-04 Electro-magnetic coil for electron lens

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6654175A JPS51142958A (en) 1975-06-04 1975-06-04 Electro-magnetic coil for electron lens

Publications (1)

Publication Number Publication Date
JPS51142958A true JPS51142958A (en) 1976-12-08

Family

ID=13318854

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6654175A Pending JPS51142958A (en) 1975-06-04 1975-06-04 Electro-magnetic coil for electron lens

Country Status (1)

Country Link
JP (1) JPS51142958A (en)

Similar Documents

Publication Publication Date Title
JPS5425747A (en) Zoom lens system
JPS51142958A (en) Electro-magnetic coil for electron lens
JPS527723A (en) Photographic lens of large aperture ratio
JPS5238235A (en) Lens holder
JPS52123823A (en) Solid pickup element
JPS5267838A (en) High frequency heater
JPS5233714A (en) Thin film magnetic head
JPS52127327A (en) Foucsing lens system
JPS5441149A (en) F.q lens
JPS51117112A (en) Method of manufacture of high strength material for sintering from cas t iron chip
JPS51118363A (en) Permanent magnet lens system
JPS526461A (en) Magnetic field type electron lens
JPS5273746A (en) Multifocal lenticular lens
JPS51112789A (en) Ozonizer
JPS5338692A (en) 7-amino-3-halo-3-cephem-4-carboxylic acids
JPS5222818A (en) Focusing circuit
JPS52127328A (en) Focusing lens system
JPS5224537A (en) Slide preparing device
JPS5223255A (en) Electron microscope
JPS5360558A (en) Electron lens
JPS52114263A (en) Coil exciting electron lens
JPS5272092A (en) Nuclear fusion device
JPS5267837A (en) High frequency heater
JPS5235974A (en) Magnetron
JPS5376694A (en) Electric field light emitting plate