JPS5222477A - Sic-si type equalizing tube for manufacturing gas impermeable semi conductors - Google Patents

Sic-si type equalizing tube for manufacturing gas impermeable semi conductors

Info

Publication number
JPS5222477A
JPS5222477A JP9823075A JP9823075A JPS5222477A JP S5222477 A JPS5222477 A JP S5222477A JP 9823075 A JP9823075 A JP 9823075A JP 9823075 A JP9823075 A JP 9823075A JP S5222477 A JPS5222477 A JP S5222477A
Authority
JP
Japan
Prior art keywords
sic
gas impermeable
equalizing tube
manufacturing gas
type equalizing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9823075A
Other languages
English (en)
Japanese (ja)
Other versions
JPS555852B2 (member.php
Inventor
Isao Sakashita
Nobuo Kimura
Teruyasu Tamamizu
Hidekazu Taji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Priority to JP9823075A priority Critical patent/JPS5222477A/ja
Publication of JPS5222477A publication Critical patent/JPS5222477A/ja
Publication of JPS555852B2 publication Critical patent/JPS555852B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP9823075A 1975-08-13 1975-08-13 Sic-si type equalizing tube for manufacturing gas impermeable semi conductors Granted JPS5222477A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9823075A JPS5222477A (en) 1975-08-13 1975-08-13 Sic-si type equalizing tube for manufacturing gas impermeable semi conductors

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9823075A JPS5222477A (en) 1975-08-13 1975-08-13 Sic-si type equalizing tube for manufacturing gas impermeable semi conductors

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP60056908A Division JPS60258918A (ja) 1985-03-20 1985-03-20 ガス不透過性半導体製造用ＳｉＣ−Ｓｉ系均熱管の製造方法
JP60056907A Division JPS60258917A (ja) 1985-03-20 1985-03-20 ガス不透過性半導体製造用ＳｉＣ−Ｓｉ系均熱管の製造方法

Publications (2)

Publication Number Publication Date
JPS5222477A true JPS5222477A (en) 1977-02-19
JPS555852B2 JPS555852B2 (member.php) 1980-02-12

Family

ID=14214148

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9823075A Granted JPS5222477A (en) 1975-08-13 1975-08-13 Sic-si type equalizing tube for manufacturing gas impermeable semi conductors

Country Status (1)

Country Link
JP (1) JPS5222477A (member.php)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56150824A (en) * 1980-04-24 1981-11-21 Toshiba Ceramics Co Ltd Silicon carbide core tube for semiconductor diffusion furnace
JPS57186263U (member.php) * 1981-05-20 1982-11-26
JPS5891017A (ja) * 1981-11-26 1983-05-30 Denki Kagaku Kogyo Kk α型窒化珪素の精製法
JPS597589A (ja) * 1982-07-07 1984-01-14 工業技術院長 把持力検出装置
JPS60258918A (ja) * 1985-03-20 1985-12-20 Toshiba Ceramics Co Ltd ガス不透過性半導体製造用ＳｉＣ−Ｓｉ系均熱管の製造方法
JPS619272U (ja) * 1984-06-19 1986-01-20 財団法人鉄道総合技術研究所 締付トルク測定記録機構付ボルト緊解機
JPS61152010A (ja) * 1984-12-26 1986-07-10 Hitachi Ltd 半導体ウエハの熱処理装置
JPH0249421A (ja) * 1989-04-28 1990-02-19 Toshiba Ceramics Co Ltd 拡散炉用炉心管の構造

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2130192B (en) * 1982-10-28 1987-01-07 Toshiba Ceramics Co Silicon carbide-based molded member for use in semiconductor manufacture

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5185374A (member.php) * 1974-12-06 1976-07-26 Norton Co

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5185374A (member.php) * 1974-12-06 1976-07-26 Norton Co

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56150824A (en) * 1980-04-24 1981-11-21 Toshiba Ceramics Co Ltd Silicon carbide core tube for semiconductor diffusion furnace
JPS57186263U (member.php) * 1981-05-20 1982-11-26
JPS5891017A (ja) * 1981-11-26 1983-05-30 Denki Kagaku Kogyo Kk α型窒化珪素の精製法
JPS597589A (ja) * 1982-07-07 1984-01-14 工業技術院長 把持力検出装置
JPS619272U (ja) * 1984-06-19 1986-01-20 財団法人鉄道総合技術研究所 締付トルク測定記録機構付ボルト緊解機
JPS61152010A (ja) * 1984-12-26 1986-07-10 Hitachi Ltd 半導体ウエハの熱処理装置
JPS60258918A (ja) * 1985-03-20 1985-12-20 Toshiba Ceramics Co Ltd ガス不透過性半導体製造用ＳｉＣ−Ｓｉ系均熱管の製造方法
JPH0249421A (ja) * 1989-04-28 1990-02-19 Toshiba Ceramics Co Ltd 拡散炉用炉心管の構造

Also Published As

Publication number Publication date
JPS555852B2 (member.php) 1980-02-12

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