JPS5218576B2 - - Google Patents

Info

Publication number
JPS5218576B2
JPS5218576B2 JP49042932A JP4293274A JPS5218576B2 JP S5218576 B2 JPS5218576 B2 JP S5218576B2 JP 49042932 A JP49042932 A JP 49042932A JP 4293274 A JP4293274 A JP 4293274A JP S5218576 B2 JPS5218576 B2 JP S5218576B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP49042932A
Other languages
Japanese (ja)
Other versions
JPS50137122A (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP49042932A priority Critical patent/JPS5218576B2/ja
Publication of JPS50137122A publication Critical patent/JPS50137122A/ja
Publication of JPS5218576B2 publication Critical patent/JPS5218576B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
JP49042932A 1974-04-17 1974-04-17 Expired JPS5218576B2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49042932A JPS5218576B2 (de) 1974-04-17 1974-04-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49042932A JPS5218576B2 (de) 1974-04-17 1974-04-17

Publications (2)

Publication Number Publication Date
JPS50137122A JPS50137122A (de) 1975-10-31
JPS5218576B2 true JPS5218576B2 (de) 1977-05-23

Family

ID=12649776

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49042932A Expired JPS5218576B2 (de) 1974-04-17 1974-04-17

Country Status (1)

Country Link
JP (1) JPS5218576B2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5466450U (de) * 1977-10-19 1979-05-11

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6679044B2 (ja) * 2016-05-24 2020-04-15 新日本無線株式会社 Mems素子

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5466450U (de) * 1977-10-19 1979-05-11

Also Published As

Publication number Publication date
JPS50137122A (de) 1975-10-31

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