JPS50137122A - - Google Patents
Info
- Publication number
- JPS50137122A JPS50137122A JP4293274A JP4293274A JPS50137122A JP S50137122 A JPS50137122 A JP S50137122A JP 4293274 A JP4293274 A JP 4293274A JP 4293274 A JP4293274 A JP 4293274A JP S50137122 A JPS50137122 A JP S50137122A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP49042932A JPS5218576B2 (de) | 1974-04-17 | 1974-04-17 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP49042932A JPS5218576B2 (de) | 1974-04-17 | 1974-04-17 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS50137122A true JPS50137122A (de) | 1975-10-31 |
JPS5218576B2 JPS5218576B2 (de) | 1977-05-23 |
Family
ID=12649776
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP49042932A Expired JPS5218576B2 (de) | 1974-04-17 | 1974-04-17 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5218576B2 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017212530A (ja) * | 2016-05-24 | 2017-11-30 | 新日本無線株式会社 | Mems素子 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5466450U (de) * | 1977-10-19 | 1979-05-11 |
-
1974
- 1974-04-17 JP JP49042932A patent/JPS5218576B2/ja not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017212530A (ja) * | 2016-05-24 | 2017-11-30 | 新日本無線株式会社 | Mems素子 |
Also Published As
Publication number | Publication date |
---|---|
JPS5218576B2 (de) | 1977-05-23 |