JPS5216407A - Apparatus for zone melting of semiconductor rod without crucible - Google Patents
Apparatus for zone melting of semiconductor rod without crucibleInfo
- Publication number
- JPS5216407A JPS5216407A JP51090117A JP9011776A JPS5216407A JP S5216407 A JPS5216407 A JP S5216407A JP 51090117 A JP51090117 A JP 51090117A JP 9011776 A JP9011776 A JP 9011776A JP S5216407 A JPS5216407 A JP S5216407A
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- zone melting
- semiconductor rod
- semiconductor
- rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE7524087U DE7524087U (de) | 1975-07-29 | 1975-07-29 | Vorrichtung zum tiegelfreien zonenschmelzen von halbleitermaterialstaeben |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5216407A true JPS5216407A (en) | 1977-02-07 |
Family
ID=6654136
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51090117A Pending JPS5216407A (en) | 1975-07-29 | 1976-07-28 | Apparatus for zone melting of semiconductor rod without crucible |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPS5216407A (ja) |
DE (1) | DE7524087U (ja) |
-
1975
- 1975-07-29 DE DE7524087U patent/DE7524087U/de not_active Expired
-
1976
- 1976-07-28 JP JP51090117A patent/JPS5216407A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
DE7524087U (de) | 1976-01-02 |
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