JPS5216170A - Formaton method of insulator thin film - Google Patents

Formaton method of insulator thin film

Info

Publication number
JPS5216170A
JPS5216170A JP50091908A JP9190875A JPS5216170A JP S5216170 A JPS5216170 A JP S5216170A JP 50091908 A JP50091908 A JP 50091908A JP 9190875 A JP9190875 A JP 9190875A JP S5216170 A JPS5216170 A JP S5216170A
Authority
JP
Japan
Prior art keywords
formaton
thin film
insulator thin
oxide film
insulator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50091908A
Other languages
English (en)
Inventor
Takao Miyazaki
Mitsunori Ketsusako
Nobuo Nakamura
Hiroshi Tamura
Eiichi Maruyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50091908A priority Critical patent/JPS5216170A/ja
Publication of JPS5216170A publication Critical patent/JPS5216170A/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Formation Of Insulating Films (AREA)
  • Light Receiving Elements (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP50091908A 1975-07-30 1975-07-30 Formaton method of insulator thin film Pending JPS5216170A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50091908A JPS5216170A (en) 1975-07-30 1975-07-30 Formaton method of insulator thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50091908A JPS5216170A (en) 1975-07-30 1975-07-30 Formaton method of insulator thin film

Publications (1)

Publication Number Publication Date
JPS5216170A true JPS5216170A (en) 1977-02-07

Family

ID=14039667

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50091908A Pending JPS5216170A (en) 1975-07-30 1975-07-30 Formaton method of insulator thin film

Country Status (1)

Country Link
JP (1) JPS5216170A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60135614A (ja) * 1983-12-23 1985-07-19 Sankei Giken Kogyo Kk 触媒コンバ−タ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60135614A (ja) * 1983-12-23 1985-07-19 Sankei Giken Kogyo Kk 触媒コンバ−タ

Similar Documents

Publication Publication Date Title
AU496795B2 (en) Fuel composition and method of manufacture
JPS52128099A (en) Electrochemical color production display device
JPS5216170A (en) Formaton method of insulator thin film
JPS51142975A (en) Production method of semiconductor devices
AU496797B2 (en) Variable resistance control with multiple paddle contactor and method of making thesame
JPS51149421A (en) Air-fuel ratio control device
JPS51119586A (en) Method of manufacturing porous blades
JPS529421A (en) Speaker equalizer and its production method
JPS52104474A (en) Control method for crystal growth
JPS5234393A (en) Production method of resistance element with voltage non-linearity
JPS5215261A (en) Method of forming films
JPS5222991A (en) Method of controlling plasma type ion source
JPS5237159A (en) Magic mirror and production method of same
JPS52115398A (en) Manufacturing method of ceramic temperature sensing resistance element
JPS51145482A (en) Ion exchange membrane
JPS5226022A (en) Flowing combustion process with low nox
JPS51126011A (en) Horizontal output trans
JPS52106512A (en) Electric car control apparatus
JPS51146696A (en) Ion-beam stabilization method
JPS5339300A (en) Production of oxide
TR18744A (tr) Sivi gazlar ve benzerlerine iliskin dagiticilarda akim kontrol ve ayarinin gelistirilmis dagiticilar
JPS5382166A (en) Electrode forming mrthod of semiconductor device
JPS5220293A (en) Thermistor composition
JPS51141546A (en) Method of manufacturing memory element with germanium lead oxide
JPS5256395A (en) Voltage non-linear resistor