JPS52156185A - Horizontalltype discharge apparatus with cross magnetic field - Google Patents

Horizontalltype discharge apparatus with cross magnetic field

Info

Publication number
JPS52156185A
JPS52156185A JP7294176A JP7294176A JPS52156185A JP S52156185 A JPS52156185 A JP S52156185A JP 7294176 A JP7294176 A JP 7294176A JP 7294176 A JP7294176 A JP 7294176A JP S52156185 A JPS52156185 A JP S52156185A
Authority
JP
Japan
Prior art keywords
horizontalltype
magnetic field
discharge apparatus
cross magnetic
cross
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7294176A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5734348B2 (enrdf_load_stackoverflow
Inventor
Makoto Katsurai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP7294176A priority Critical patent/JPS52156185A/ja
Publication of JPS52156185A publication Critical patent/JPS52156185A/ja
Publication of JPS5734348B2 publication Critical patent/JPS5734348B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Physical Vapour Deposition (AREA)
JP7294176A 1976-06-21 1976-06-21 Horizontalltype discharge apparatus with cross magnetic field Granted JPS52156185A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7294176A JPS52156185A (en) 1976-06-21 1976-06-21 Horizontalltype discharge apparatus with cross magnetic field

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7294176A JPS52156185A (en) 1976-06-21 1976-06-21 Horizontalltype discharge apparatus with cross magnetic field

Publications (2)

Publication Number Publication Date
JPS52156185A true JPS52156185A (en) 1977-12-26
JPS5734348B2 JPS5734348B2 (enrdf_load_stackoverflow) 1982-07-22

Family

ID=13503893

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7294176A Granted JPS52156185A (en) 1976-06-21 1976-06-21 Horizontalltype discharge apparatus with cross magnetic field

Country Status (1)

Country Link
JP (1) JPS52156185A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6319748A (ja) * 1986-07-11 1988-01-27 Sony Corp マグネトロン放電装置

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS473154U (enrdf_load_stackoverflow) * 1971-01-29 1972-09-02
JPS4825401U (enrdf_load_stackoverflow) * 1971-08-02 1973-03-26
JPS5011480A (enrdf_load_stackoverflow) * 1973-06-01 1975-02-05
JPS50160181A (enrdf_load_stackoverflow) * 1974-06-20 1975-12-25
JPS5288277A (en) * 1976-01-19 1977-07-23 Comtec Kk Spatter coating apparatus
JPS5295581A (en) * 1976-02-09 1977-08-11 Anelva Corp Sputiering apparatus

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS473154U (enrdf_load_stackoverflow) * 1971-01-29 1972-09-02
JPS4825401U (enrdf_load_stackoverflow) * 1971-08-02 1973-03-26
JPS5011480A (enrdf_load_stackoverflow) * 1973-06-01 1975-02-05
JPS50160181A (enrdf_load_stackoverflow) * 1974-06-20 1975-12-25
JPS5288277A (en) * 1976-01-19 1977-07-23 Comtec Kk Spatter coating apparatus
JPS5295581A (en) * 1976-02-09 1977-08-11 Anelva Corp Sputiering apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6319748A (ja) * 1986-07-11 1988-01-27 Sony Corp マグネトロン放電装置

Also Published As

Publication number Publication date
JPS5734348B2 (enrdf_load_stackoverflow) 1982-07-22

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