JPS52155059A - Device for high pressure oxidation diffusion for semiconductor - Google Patents

Device for high pressure oxidation diffusion for semiconductor

Info

Publication number
JPS52155059A
JPS52155059A JP9228276A JP9228276A JPS52155059A JP S52155059 A JPS52155059 A JP S52155059A JP 9228276 A JP9228276 A JP 9228276A JP 9228276 A JP9228276 A JP 9228276A JP S52155059 A JPS52155059 A JP S52155059A
Authority
JP
Japan
Prior art keywords
semiconductor
high pressure
pressure oxidation
oxidation diffusion
diffusion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9228276A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5433954B2 (https=
Inventor
Riyouzou Satou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Sagami Ltd
Original Assignee
Tokyo Electron Sagami Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Sagami Ltd filed Critical Tokyo Electron Sagami Ltd
Priority to JP9228276A priority Critical patent/JPS52155059A/ja
Publication of JPS52155059A publication Critical patent/JPS52155059A/ja
Publication of JPS5433954B2 publication Critical patent/JPS5433954B2/ja
Granted legal-status Critical Current

Links

JP9228276A 1976-08-04 1976-08-04 Device for high pressure oxidation diffusion for semiconductor Granted JPS52155059A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9228276A JPS52155059A (en) 1976-08-04 1976-08-04 Device for high pressure oxidation diffusion for semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9228276A JPS52155059A (en) 1976-08-04 1976-08-04 Device for high pressure oxidation diffusion for semiconductor

Publications (2)

Publication Number Publication Date
JPS52155059A true JPS52155059A (en) 1977-12-23
JPS5433954B2 JPS5433954B2 (https=) 1979-10-24

Family

ID=14050037

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9228276A Granted JPS52155059A (en) 1976-08-04 1976-08-04 Device for high pressure oxidation diffusion for semiconductor

Country Status (1)

Country Link
JP (1) JPS52155059A (https=)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6092827U (ja) * 1983-11-30 1985-06-25 富士通株式会社 熱処理炉
JPS6224630A (ja) * 1985-07-24 1987-02-02 Mitsubishi Electric Corp 熱酸化膜形成方法及びその装置
JPH01280320A (ja) * 1988-05-06 1989-11-10 Tel Sagami Ltd 半導体加圧酸化方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6092827U (ja) * 1983-11-30 1985-06-25 富士通株式会社 熱処理炉
JPS6224630A (ja) * 1985-07-24 1987-02-02 Mitsubishi Electric Corp 熱酸化膜形成方法及びその装置
JPH01280320A (ja) * 1988-05-06 1989-11-10 Tel Sagami Ltd 半導体加圧酸化方法

Also Published As

Publication number Publication date
JPS5433954B2 (https=) 1979-10-24

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