JPS52154345A - Liquid phase epitaxial growth apparatus - Google Patents

Liquid phase epitaxial growth apparatus

Info

Publication number
JPS52154345A
JPS52154345A JP7095276A JP7095276A JPS52154345A JP S52154345 A JPS52154345 A JP S52154345A JP 7095276 A JP7095276 A JP 7095276A JP 7095276 A JP7095276 A JP 7095276A JP S52154345 A JPS52154345 A JP S52154345A
Authority
JP
Japan
Prior art keywords
liquid phase
epitaxial growth
growth apparatus
phase epitaxial
slidable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7095276A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5551336B2 (OSRAM
Inventor
Yorimitsu Nishitani
Kazuo Nakajima
Kenzo Akita
Takeshi Kotani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP7095276A priority Critical patent/JPS52154345A/ja
Publication of JPS52154345A publication Critical patent/JPS52154345A/ja
Publication of JPS5551336B2 publication Critical patent/JPS5551336B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP7095276A 1976-06-18 1976-06-18 Liquid phase epitaxial growth apparatus Granted JPS52154345A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7095276A JPS52154345A (en) 1976-06-18 1976-06-18 Liquid phase epitaxial growth apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7095276A JPS52154345A (en) 1976-06-18 1976-06-18 Liquid phase epitaxial growth apparatus

Publications (2)

Publication Number Publication Date
JPS52154345A true JPS52154345A (en) 1977-12-22
JPS5551336B2 JPS5551336B2 (OSRAM) 1980-12-23

Family

ID=13446341

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7095276A Granted JPS52154345A (en) 1976-06-18 1976-06-18 Liquid phase epitaxial growth apparatus

Country Status (1)

Country Link
JP (1) JPS52154345A (OSRAM)

Also Published As

Publication number Publication date
JPS5551336B2 (OSRAM) 1980-12-23

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