JPS52152173A - Method of hardening aqueousssoluble resist pattern - Google Patents

Method of hardening aqueousssoluble resist pattern

Info

Publication number
JPS52152173A
JPS52152173A JP6944476A JP6944476A JPS52152173A JP S52152173 A JPS52152173 A JP S52152173A JP 6944476 A JP6944476 A JP 6944476A JP 6944476 A JP6944476 A JP 6944476A JP S52152173 A JPS52152173 A JP S52152173A
Authority
JP
Japan
Prior art keywords
aqueousssoluble
hardening
resist pattern
resist
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6944476A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5723254B2 (enrdf_load_stackoverflow
Inventor
Shiyouzou Miyazawa
Yoshimi Satou
Isamu Hijikata
Muneo Nakayama
Hisashi Nakane
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TOKYO OUKA KOUGIYOU KK
Original Assignee
TOKYO OUKA KOUGIYOU KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TOKYO OUKA KOUGIYOU KK filed Critical TOKYO OUKA KOUGIYOU KK
Priority to JP6944476A priority Critical patent/JPS52152173A/ja
Publication of JPS52152173A publication Critical patent/JPS52152173A/ja
Publication of JPS5723254B2 publication Critical patent/JPS5723254B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • ing And Chemical Polishing (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP6944476A 1976-06-14 1976-06-14 Method of hardening aqueousssoluble resist pattern Granted JPS52152173A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6944476A JPS52152173A (en) 1976-06-14 1976-06-14 Method of hardening aqueousssoluble resist pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6944476A JPS52152173A (en) 1976-06-14 1976-06-14 Method of hardening aqueousssoluble resist pattern

Publications (2)

Publication Number Publication Date
JPS52152173A true JPS52152173A (en) 1977-12-17
JPS5723254B2 JPS5723254B2 (enrdf_load_stackoverflow) 1982-05-18

Family

ID=13402805

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6944476A Granted JPS52152173A (en) 1976-06-14 1976-06-14 Method of hardening aqueousssoluble resist pattern

Country Status (1)

Country Link
JP (1) JPS52152173A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55132041A (en) * 1979-03-30 1980-10-14 Ibm Method of increasing corrosion resistance for reactive ion or plasma etching process
JPS5844715A (ja) * 1981-09-11 1983-03-15 Fujitsu Ltd 微細パタ−ン形成方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5040046A (enrdf_load_stackoverflow) * 1973-08-15 1975-04-12
JPS526205A (en) * 1975-06-30 1977-01-18 Hoechst Ag Method of producing lithographic plate

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5040046A (enrdf_load_stackoverflow) * 1973-08-15 1975-04-12
JPS526205A (en) * 1975-06-30 1977-01-18 Hoechst Ag Method of producing lithographic plate

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55132041A (en) * 1979-03-30 1980-10-14 Ibm Method of increasing corrosion resistance for reactive ion or plasma etching process
JPS5844715A (ja) * 1981-09-11 1983-03-15 Fujitsu Ltd 微細パタ−ン形成方法

Also Published As

Publication number Publication date
JPS5723254B2 (enrdf_load_stackoverflow) 1982-05-18

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