JPS5723254B2 - - Google Patents

Info

Publication number
JPS5723254B2
JPS5723254B2 JP6944476A JP6944476A JPS5723254B2 JP S5723254 B2 JPS5723254 B2 JP S5723254B2 JP 6944476 A JP6944476 A JP 6944476A JP 6944476 A JP6944476 A JP 6944476A JP S5723254 B2 JPS5723254 B2 JP S5723254B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6944476A
Other languages
Japanese (ja)
Other versions
JPS52152173A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6944476A priority Critical patent/JPS52152173A/ja
Publication of JPS52152173A publication Critical patent/JPS52152173A/ja
Publication of JPS5723254B2 publication Critical patent/JPS5723254B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • ing And Chemical Polishing (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP6944476A 1976-06-14 1976-06-14 Method of hardening aqueousssoluble resist pattern Granted JPS52152173A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6944476A JPS52152173A (en) 1976-06-14 1976-06-14 Method of hardening aqueousssoluble resist pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6944476A JPS52152173A (en) 1976-06-14 1976-06-14 Method of hardening aqueousssoluble resist pattern

Publications (2)

Publication Number Publication Date
JPS52152173A JPS52152173A (en) 1977-12-17
JPS5723254B2 true JPS5723254B2 (enrdf_load_stackoverflow) 1982-05-18

Family

ID=13402805

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6944476A Granted JPS52152173A (en) 1976-06-14 1976-06-14 Method of hardening aqueousssoluble resist pattern

Country Status (1)

Country Link
JP (1) JPS52152173A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5840333B2 (ja) * 1979-03-30 1983-09-05 インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション 微小回路の製造方法
JPS5844715A (ja) * 1981-09-11 1983-03-15 Fujitsu Ltd 微細パタ−ン形成方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5040046A (enrdf_load_stackoverflow) * 1973-08-15 1975-04-12
CH613059A5 (en) * 1975-06-30 1979-08-31 Hoechst Ag Method for producing a flat-bed printing forme

Also Published As

Publication number Publication date
JPS52152173A (en) 1977-12-17

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