JPS52150689A - Ion micro analyzer - Google Patents

Ion micro analyzer

Info

Publication number
JPS52150689A
JPS52150689A JP6653676A JP6653676A JPS52150689A JP S52150689 A JPS52150689 A JP S52150689A JP 6653676 A JP6653676 A JP 6653676A JP 6653676 A JP6653676 A JP 6653676A JP S52150689 A JPS52150689 A JP S52150689A
Authority
JP
Japan
Prior art keywords
ion
micro analyzer
ion micro
electro
impurity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6653676A
Other languages
Japanese (ja)
Other versions
JPS6142223B2 (en
Inventor
Hifumi Tamura
Toru Ishitani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6653676A priority Critical patent/JPS52150689A/en
Publication of JPS52150689A publication Critical patent/JPS52150689A/en
Publication of JPS6142223B2 publication Critical patent/JPS6142223B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To make possible quantitative analysis of extremely small quantity of impurity in the order of ppm directly from intensity of spectrum, by irradiating electro-positive ion and electro-negative ion as primary ion simultaneously or periodically.
JP6653676A 1976-06-09 1976-06-09 Ion micro analyzer Granted JPS52150689A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6653676A JPS52150689A (en) 1976-06-09 1976-06-09 Ion micro analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6653676A JPS52150689A (en) 1976-06-09 1976-06-09 Ion micro analyzer

Publications (2)

Publication Number Publication Date
JPS52150689A true JPS52150689A (en) 1977-12-14
JPS6142223B2 JPS6142223B2 (en) 1986-09-19

Family

ID=13318705

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6653676A Granted JPS52150689A (en) 1976-06-09 1976-06-09 Ion micro analyzer

Country Status (1)

Country Link
JP (1) JPS52150689A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01167643A (en) * 1987-12-23 1989-07-03 Res Dev Corp Of Japan Microprobe surface analyzing device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01167643A (en) * 1987-12-23 1989-07-03 Res Dev Corp Of Japan Microprobe surface analyzing device

Also Published As

Publication number Publication date
JPS6142223B2 (en) 1986-09-19

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