JPS52130389A - Test piece analyzing means - Google Patents

Test piece analyzing means

Info

Publication number
JPS52130389A
JPS52130389A JP4658976A JP4658976A JPS52130389A JP S52130389 A JPS52130389 A JP S52130389A JP 4658976 A JP4658976 A JP 4658976A JP 4658976 A JP4658976 A JP 4658976A JP S52130389 A JPS52130389 A JP S52130389A
Authority
JP
Japan
Prior art keywords
test piece
analyzing means
piece analyzing
electro
employing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4658976A
Other languages
Japanese (ja)
Other versions
JPS6018935B2 (en
Inventor
Hifumi Tamura
Michiyasu Ito
Toru Ishitani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP51046589A priority Critical patent/JPS6018935B2/en
Publication of JPS52130389A publication Critical patent/JPS52130389A/en
Publication of JPS6018935B2 publication Critical patent/JPS6018935B2/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To directly obtain quantitative value from the spectral strength of the secondary ion, by introducing a gas which is composed of electro-negative chemical element into the test room after employing an electro-positive atom or molecule for the primary ion.
JP51046589A 1976-04-26 1976-04-26 Sample analysis method Expired JPS6018935B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP51046589A JPS6018935B2 (en) 1976-04-26 1976-04-26 Sample analysis method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51046589A JPS6018935B2 (en) 1976-04-26 1976-04-26 Sample analysis method

Publications (2)

Publication Number Publication Date
JPS52130389A true JPS52130389A (en) 1977-11-01
JPS6018935B2 JPS6018935B2 (en) 1985-05-13

Family

ID=12751467

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51046589A Expired JPS6018935B2 (en) 1976-04-26 1976-04-26 Sample analysis method

Country Status (1)

Country Link
JP (1) JPS6018935B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01167643A (en) * 1987-12-23 1989-07-03 Res Dev Corp Of Japan Microprobe surface analyzing device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4807776A (en) * 1987-09-04 1989-02-28 Taco Bell Multi-compartmented container arrangement

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01167643A (en) * 1987-12-23 1989-07-03 Res Dev Corp Of Japan Microprobe surface analyzing device

Also Published As

Publication number Publication date
JPS6018935B2 (en) 1985-05-13

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