JPS52145419A - Manufacture of silicon carbide articles for semiconductor production - Google Patents

Manufacture of silicon carbide articles for semiconductor production

Info

Publication number
JPS52145419A
JPS52145419A JP6276176A JP6276176A JPS52145419A JP S52145419 A JPS52145419 A JP S52145419A JP 6276176 A JP6276176 A JP 6276176A JP 6276176 A JP6276176 A JP 6276176A JP S52145419 A JPS52145419 A JP S52145419A
Authority
JP
Japan
Prior art keywords
manufacture
silicon carbide
semiconductor production
carbide articles
articles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6276176A
Other languages
English (en)
Other versions
JPS5910954B2 (ja
Inventor
Kazunari Ban
Hidekazu Tamichi
Hideitsu Matsuo
Isao Sakashita
Shigekatsu Takeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Priority to JP6276176A priority Critical patent/JPS5910954B2/ja
Publication of JPS52145419A publication Critical patent/JPS52145419A/ja
Publication of JPS5910954B2 publication Critical patent/JPS5910954B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Laminated Bodies (AREA)
  • Bipolar Transistors (AREA)
JP6276176A 1976-05-29 1976-05-29 半導体製造用炭化珪素体の製造方法 Expired JPS5910954B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6276176A JPS5910954B2 (ja) 1976-05-29 1976-05-29 半導体製造用炭化珪素体の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6276176A JPS5910954B2 (ja) 1976-05-29 1976-05-29 半導体製造用炭化珪素体の製造方法

Publications (2)

Publication Number Publication Date
JPS52145419A true JPS52145419A (en) 1977-12-03
JPS5910954B2 JPS5910954B2 (ja) 1984-03-12

Family

ID=13209690

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6276176A Expired JPS5910954B2 (ja) 1976-05-29 1976-05-29 半導体製造用炭化珪素体の製造方法

Country Status (1)

Country Link
JP (1) JPS5910954B2 (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55158622A (en) * 1979-05-30 1980-12-10 Toshiba Ceramics Co Ltd Manufacture of silicon carbide material for semiconductor
JPS57209885A (en) * 1981-06-22 1982-12-23 Toshiba Ceramics Co Member for low melting point metal melt keeping furnace
JPS5946491A (ja) * 1982-09-10 1984-03-15 Toshiba Ceramics Co Ltd 炭化珪素質熱交換器
US4761134A (en) * 1987-03-30 1988-08-02 Norton Company Silicon carbide diffusion furnace components with an impervious coating thereon
EP0967189A1 (en) * 1998-06-23 1999-12-29 Ngk Insulators, Ltd. A highly resistive recrystallized silicon carbide, an anti-corrosive member, a method for producing the highly resistive recrystallized silicon carbide, and a method for producing the anti-corrosive member

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH033081Y2 (ja) * 1984-12-19 1991-01-28

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55158622A (en) * 1979-05-30 1980-12-10 Toshiba Ceramics Co Ltd Manufacture of silicon carbide material for semiconductor
JPS6310576B2 (ja) * 1979-05-30 1988-03-08 Toshiba Ceramics Co
JPS57209885A (en) * 1981-06-22 1982-12-23 Toshiba Ceramics Co Member for low melting point metal melt keeping furnace
JPS6214505B2 (ja) * 1981-06-22 1987-04-02 Toshiba Ceramics Co
JPS5946491A (ja) * 1982-09-10 1984-03-15 Toshiba Ceramics Co Ltd 炭化珪素質熱交換器
JPH026998B2 (ja) * 1982-09-10 1990-02-14 Toshiba Ceramics Co
US4761134A (en) * 1987-03-30 1988-08-02 Norton Company Silicon carbide diffusion furnace components with an impervious coating thereon
EP0967189A1 (en) * 1998-06-23 1999-12-29 Ngk Insulators, Ltd. A highly resistive recrystallized silicon carbide, an anti-corrosive member, a method for producing the highly resistive recrystallized silicon carbide, and a method for producing the anti-corrosive member

Also Published As

Publication number Publication date
JPS5910954B2 (ja) 1984-03-12

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