JPS52142489A - Semiconductor strain measuring device and its production - Google Patents
Semiconductor strain measuring device and its productionInfo
- Publication number
- JPS52142489A JPS52142489A JP5785376A JP5785376A JPS52142489A JP S52142489 A JPS52142489 A JP S52142489A JP 5785376 A JP5785376 A JP 5785376A JP 5785376 A JP5785376 A JP 5785376A JP S52142489 A JPS52142489 A JP S52142489A
- Authority
- JP
- Japan
- Prior art keywords
- strain
- production
- measuring device
- semiconductor strain
- strain measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5785376A JPS52142489A (en) | 1976-05-21 | 1976-05-21 | Semiconductor strain measuring device and its production |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5785376A JPS52142489A (en) | 1976-05-21 | 1976-05-21 | Semiconductor strain measuring device and its production |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52142489A true JPS52142489A (en) | 1977-11-28 |
Family
ID=13067538
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5785376A Pending JPS52142489A (en) | 1976-05-21 | 1976-05-21 | Semiconductor strain measuring device and its production |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52142489A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63232375A (ja) * | 1987-03-20 | 1988-09-28 | Derufuai:Kk | 応力変換器 |
-
1976
- 1976-05-21 JP JP5785376A patent/JPS52142489A/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63232375A (ja) * | 1987-03-20 | 1988-09-28 | Derufuai:Kk | 応力変換器 |
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