JPS52140766U - - Google Patents

Info

Publication number
JPS52140766U
JPS52140766U JP4956476U JP4956476U JPS52140766U JP S52140766 U JPS52140766 U JP S52140766U JP 4956476 U JP4956476 U JP 4956476U JP 4956476 U JP4956476 U JP 4956476U JP S52140766 U JPS52140766 U JP S52140766U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4956476U
Other languages
Japanese (ja)
Other versions
JPS568186Y2 (sk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4956476U priority Critical patent/JPS568186Y2/ja
Publication of JPS52140766U publication Critical patent/JPS52140766U/ja
Application granted granted Critical
Publication of JPS568186Y2 publication Critical patent/JPS568186Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP4956476U 1976-04-20 1976-04-20 Expired JPS568186Y2 (sk)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4956476U JPS568186Y2 (sk) 1976-04-20 1976-04-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4956476U JPS568186Y2 (sk) 1976-04-20 1976-04-20

Publications (2)

Publication Number Publication Date
JPS52140766U true JPS52140766U (sk) 1977-10-25
JPS568186Y2 JPS568186Y2 (sk) 1981-02-23

Family

ID=28508745

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4956476U Expired JPS568186Y2 (sk) 1976-04-20 1976-04-20

Country Status (1)

Country Link
JP (1) JPS568186Y2 (sk)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56135926A (en) * 1980-03-27 1981-10-23 Fujitsu Ltd Cell for source of molecular beam
JPS5730321A (en) * 1980-07-29 1982-02-18 Fujitsu Ltd Molecular beam source for molecular beam epitaxy

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56135926A (en) * 1980-03-27 1981-10-23 Fujitsu Ltd Cell for source of molecular beam
JPS5730321A (en) * 1980-07-29 1982-02-18 Fujitsu Ltd Molecular beam source for molecular beam epitaxy

Also Published As

Publication number Publication date
JPS568186Y2 (sk) 1981-02-23

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