JPS52140766U - - Google Patents

Info

Publication number
JPS52140766U
JPS52140766U JP4956476U JP4956476U JPS52140766U JP S52140766 U JPS52140766 U JP S52140766U JP 4956476 U JP4956476 U JP 4956476U JP 4956476 U JP4956476 U JP 4956476U JP S52140766 U JPS52140766 U JP S52140766U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4956476U
Other languages
Japanese (ja)
Other versions
JPS568186Y2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4956476U priority Critical patent/JPS568186Y2/ja
Publication of JPS52140766U publication Critical patent/JPS52140766U/ja
Application granted granted Critical
Publication of JPS568186Y2 publication Critical patent/JPS568186Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP4956476U 1976-04-20 1976-04-20 Expired JPS568186Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4956476U JPS568186Y2 (cg-RX-API-DMAC7.html) 1976-04-20 1976-04-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4956476U JPS568186Y2 (cg-RX-API-DMAC7.html) 1976-04-20 1976-04-20

Publications (2)

Publication Number Publication Date
JPS52140766U true JPS52140766U (cg-RX-API-DMAC7.html) 1977-10-25
JPS568186Y2 JPS568186Y2 (cg-RX-API-DMAC7.html) 1981-02-23

Family

ID=28508745

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4956476U Expired JPS568186Y2 (cg-RX-API-DMAC7.html) 1976-04-20 1976-04-20

Country Status (1)

Country Link
JP (1) JPS568186Y2 (cg-RX-API-DMAC7.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56135926A (en) * 1980-03-27 1981-10-23 Fujitsu Ltd Cell for source of molecular beam
JPS5730321A (en) * 1980-07-29 1982-02-18 Fujitsu Ltd Molecular beam source for molecular beam epitaxy

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56135926A (en) * 1980-03-27 1981-10-23 Fujitsu Ltd Cell for source of molecular beam
JPS5730321A (en) * 1980-07-29 1982-02-18 Fujitsu Ltd Molecular beam source for molecular beam epitaxy

Also Published As

Publication number Publication date
JPS568186Y2 (cg-RX-API-DMAC7.html) 1981-02-23

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