JPS52140480A - Sputtering evaporation apparatus by ion beam - Google Patents
Sputtering evaporation apparatus by ion beamInfo
- Publication number
- JPS52140480A JPS52140480A JP5720376A JP5720376A JPS52140480A JP S52140480 A JPS52140480 A JP S52140480A JP 5720376 A JP5720376 A JP 5720376A JP 5720376 A JP5720376 A JP 5720376A JP S52140480 A JPS52140480 A JP S52140480A
- Authority
- JP
- Japan
- Prior art keywords
- ion beam
- evaporation apparatus
- sputtering evaporation
- base board
- sputtering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/46—Sputtering by ion beam produced by an external ion source
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5720376A JPS52140480A (en) | 1976-05-20 | 1976-05-20 | Sputtering evaporation apparatus by ion beam |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5720376A JPS52140480A (en) | 1976-05-20 | 1976-05-20 | Sputtering evaporation apparatus by ion beam |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52140480A true JPS52140480A (en) | 1977-11-24 |
Family
ID=13048930
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5720376A Pending JPS52140480A (en) | 1976-05-20 | 1976-05-20 | Sputtering evaporation apparatus by ion beam |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52140480A (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5790937A (en) * | 1980-11-27 | 1982-06-05 | Nec Corp | Method of ion beam deposition |
JPS57175747A (en) * | 1981-04-17 | 1982-10-28 | Furukawa Electric Co Ltd:The | Coating method of optical fiber with metal |
JPS60258839A (ja) * | 1984-06-06 | 1985-12-20 | Hitachi Ltd | イオンビ−ム装置 |
JPS62167878A (ja) * | 1985-12-09 | 1987-07-24 | Shimadzu Corp | Ecrスパツタ装置 |
JPH07220672A (ja) * | 1994-12-26 | 1995-08-18 | Hitachi Ltd | イオンビーム装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4936544A (ja) * | 1972-08-08 | 1974-04-04 | ||
JPS4982588A (ja) * | 1972-12-14 | 1974-08-08 |
-
1976
- 1976-05-20 JP JP5720376A patent/JPS52140480A/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4936544A (ja) * | 1972-08-08 | 1974-04-04 | ||
JPS4982588A (ja) * | 1972-12-14 | 1974-08-08 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5790937A (en) * | 1980-11-27 | 1982-06-05 | Nec Corp | Method of ion beam deposition |
JPH0140914B2 (ja) * | 1980-11-27 | 1989-09-01 | Nippon Electric Co | |
JPS57175747A (en) * | 1981-04-17 | 1982-10-28 | Furukawa Electric Co Ltd:The | Coating method of optical fiber with metal |
JPS60258839A (ja) * | 1984-06-06 | 1985-12-20 | Hitachi Ltd | イオンビ−ム装置 |
JPS62167878A (ja) * | 1985-12-09 | 1987-07-24 | Shimadzu Corp | Ecrスパツタ装置 |
JPH07220672A (ja) * | 1994-12-26 | 1995-08-18 | Hitachi Ltd | イオンビーム装置 |
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