JPS4982588A - - Google Patents

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Publication number
JPS4982588A
JPS4982588A JP12598372A JP12598372A JPS4982588A JP S4982588 A JPS4982588 A JP S4982588A JP 12598372 A JP12598372 A JP 12598372A JP 12598372 A JP12598372 A JP 12598372A JP S4982588 A JPS4982588 A JP S4982588A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12598372A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12598372A priority Critical patent/JPS4982588A/ja
Publication of JPS4982588A publication Critical patent/JPS4982588A/ja
Pending legal-status Critical Current

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  • Physical Vapour Deposition (AREA)
JP12598372A 1972-12-14 1972-12-14 Pending JPS4982588A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12598372A JPS4982588A (ja) 1972-12-14 1972-12-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12598372A JPS4982588A (ja) 1972-12-14 1972-12-14

Publications (1)

Publication Number Publication Date
JPS4982588A true JPS4982588A (ja) 1974-08-08

Family

ID=14923806

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12598372A Pending JPS4982588A (ja) 1972-12-14 1972-12-14

Country Status (1)

Country Link
JP (1) JPS4982588A (ja)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51145333A (en) * 1975-06-09 1976-12-14 Shuzo Hattori Manufacturing method of multi-layer dielectric film reflector
JPS5266756U (ja) * 1975-11-13 1977-05-17
JPS52139345U (ja) * 1976-04-15 1977-10-22
JPS52139346U (ja) * 1976-04-15 1977-10-22
JPS52140480A (en) * 1976-05-20 1977-11-24 Nippon Telegr & Teleph Corp <Ntt> Sputtering evaporation apparatus by ion beam
JPS5956577A (ja) * 1982-09-25 1984-04-02 Matsushita Electric Ind Co Ltd 蒸着方法
JPS6353257A (ja) * 1986-08-22 1988-03-07 Fuji Electric Co Ltd 半導体ウエハの蒸着方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3523517A (en) * 1968-09-04 1970-08-11 Sloan Instr Corp Rotating workpiece holder
US3643625A (en) * 1969-10-07 1972-02-22 Carl Herrmann Associates Inc Thin-film deposition apparatus

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3523517A (en) * 1968-09-04 1970-08-11 Sloan Instr Corp Rotating workpiece holder
US3643625A (en) * 1969-10-07 1972-02-22 Carl Herrmann Associates Inc Thin-film deposition apparatus

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51145333A (en) * 1975-06-09 1976-12-14 Shuzo Hattori Manufacturing method of multi-layer dielectric film reflector
JPS5266756U (ja) * 1975-11-13 1977-05-17
JPS52139345U (ja) * 1976-04-15 1977-10-22
JPS52139346U (ja) * 1976-04-15 1977-10-22
JPS52140480A (en) * 1976-05-20 1977-11-24 Nippon Telegr & Teleph Corp <Ntt> Sputtering evaporation apparatus by ion beam
JPS5956577A (ja) * 1982-09-25 1984-04-02 Matsushita Electric Ind Co Ltd 蒸着方法
JPS6353257A (ja) * 1986-08-22 1988-03-07 Fuji Electric Co Ltd 半導体ウエハの蒸着方法

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