JPS52138074A - Power source for spattering - Google Patents

Power source for spattering

Info

Publication number
JPS52138074A
JPS52138074A JP5498576A JP5498576A JPS52138074A JP S52138074 A JPS52138074 A JP S52138074A JP 5498576 A JP5498576 A JP 5498576A JP 5498576 A JP5498576 A JP 5498576A JP S52138074 A JPS52138074 A JP S52138074A
Authority
JP
Japan
Prior art keywords
spattering
power source
source
power
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5498576A
Other languages
Japanese (ja)
Inventor
Noboru Kuriyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokuda Seisakusho Co Ltd
Original Assignee
Tokuda Seisakusho Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokuda Seisakusho Co Ltd filed Critical Tokuda Seisakusho Co Ltd
Priority to JP5498576A priority Critical patent/JPS52138074A/en
Publication of JPS52138074A publication Critical patent/JPS52138074A/en
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Control Of Voltage And Current In General (AREA)
JP5498576A 1976-05-14 1976-05-14 Power source for spattering Pending JPS52138074A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5498576A JPS52138074A (en) 1976-05-14 1976-05-14 Power source for spattering

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5498576A JPS52138074A (en) 1976-05-14 1976-05-14 Power source for spattering

Publications (1)

Publication Number Publication Date
JPS52138074A true JPS52138074A (en) 1977-11-17

Family

ID=12985932

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5498576A Pending JPS52138074A (en) 1976-05-14 1976-05-14 Power source for spattering

Country Status (1)

Country Link
JP (1) JPS52138074A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01310414A (en) * 1988-06-08 1989-12-14 Murata Mfg Co Ltd High voltage power source device
CN103774105A (en) * 2014-01-10 2014-05-07 西安理工大学 Arc detection and inhibition method for magnetron sputtering process

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01310414A (en) * 1988-06-08 1989-12-14 Murata Mfg Co Ltd High voltage power source device
CN103774105A (en) * 2014-01-10 2014-05-07 西安理工大学 Arc detection and inhibition method for magnetron sputtering process

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