JPS52138074A - Power source for spattering - Google Patents
Power source for spatteringInfo
- Publication number
- JPS52138074A JPS52138074A JP5498576A JP5498576A JPS52138074A JP S52138074 A JPS52138074 A JP S52138074A JP 5498576 A JP5498576 A JP 5498576A JP 5498576 A JP5498576 A JP 5498576A JP S52138074 A JPS52138074 A JP S52138074A
- Authority
- JP
- Japan
- Prior art keywords
- spattering
- power source
- source
- power
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Control Of Voltage And Current In General (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5498576A JPS52138074A (en) | 1976-05-14 | 1976-05-14 | Power source for spattering |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5498576A JPS52138074A (en) | 1976-05-14 | 1976-05-14 | Power source for spattering |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52138074A true JPS52138074A (en) | 1977-11-17 |
Family
ID=12985932
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5498576A Pending JPS52138074A (en) | 1976-05-14 | 1976-05-14 | Power source for spattering |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52138074A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01310414A (en) * | 1988-06-08 | 1989-12-14 | Murata Mfg Co Ltd | High voltage power source device |
CN103774105A (en) * | 2014-01-10 | 2014-05-07 | 西安理工大学 | Arc detection and inhibition method for magnetron sputtering process |
-
1976
- 1976-05-14 JP JP5498576A patent/JPS52138074A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01310414A (en) * | 1988-06-08 | 1989-12-14 | Murata Mfg Co Ltd | High voltage power source device |
CN103774105A (en) * | 2014-01-10 | 2014-05-07 | 西安理工大学 | Arc detection and inhibition method for magnetron sputtering process |
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