JPS5285798A - Spattering power source device - Google Patents
Spattering power source deviceInfo
- Publication number
- JPS5285798A JPS5285798A JP194876A JP194876A JPS5285798A JP S5285798 A JPS5285798 A JP S5285798A JP 194876 A JP194876 A JP 194876A JP 194876 A JP194876 A JP 194876A JP S5285798 A JPS5285798 A JP S5285798A
- Authority
- JP
- Japan
- Prior art keywords
- power source
- source device
- spattering
- spattering power
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Control Of Voltage And Current In General (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP194876A JPS5285798A (en) | 1976-01-09 | 1976-01-09 | Spattering power source device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP194876A JPS5285798A (en) | 1976-01-09 | 1976-01-09 | Spattering power source device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5285798A true JPS5285798A (en) | 1977-07-16 |
JPS5628287B2 JPS5628287B2 (en) | 1981-07-01 |
Family
ID=11515818
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP194876A Granted JPS5285798A (en) | 1976-01-09 | 1976-01-09 | Spattering power source device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5285798A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55145170A (en) * | 1979-04-28 | 1980-11-12 | Tokuda Seisakusho Ltd | Arc-breaking method of direct current electric discharge unit and its circuit |
JPS5680552A (en) * | 1979-11-26 | 1981-07-01 | Keikan Kin | Automatic stepless speed change device |
JPS5769324A (en) * | 1980-10-11 | 1982-04-28 | Daiwa Dengiyou Kk | Monitor device of dc power supply |
JPS57123424A (en) * | 1981-01-26 | 1982-07-31 | Toko Inc | Dc power supply device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5060528U (en) * | 1973-09-29 | 1975-06-04 |
-
1976
- 1976-01-09 JP JP194876A patent/JPS5285798A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5060528U (en) * | 1973-09-29 | 1975-06-04 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55145170A (en) * | 1979-04-28 | 1980-11-12 | Tokuda Seisakusho Ltd | Arc-breaking method of direct current electric discharge unit and its circuit |
JPS5680552A (en) * | 1979-11-26 | 1981-07-01 | Keikan Kin | Automatic stepless speed change device |
JPS5769324A (en) * | 1980-10-11 | 1982-04-28 | Daiwa Dengiyou Kk | Monitor device of dc power supply |
JPS57123424A (en) * | 1981-01-26 | 1982-07-31 | Toko Inc | Dc power supply device |
JPH026085B2 (en) * | 1981-01-26 | 1990-02-07 | Eastern Steel |
Also Published As
Publication number | Publication date |
---|---|
JPS5628287B2 (en) | 1981-07-01 |
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