JPS5213789A - Strain-gauge use semiconductor thine film element group - Google Patents

Strain-gauge use semiconductor thine film element group

Info

Publication number
JPS5213789A
JPS5213789A JP8988275A JP8988275A JPS5213789A JP S5213789 A JPS5213789 A JP S5213789A JP 8988275 A JP8988275 A JP 8988275A JP 8988275 A JP8988275 A JP 8988275A JP S5213789 A JPS5213789 A JP S5213789A
Authority
JP
Japan
Prior art keywords
strain
film element
thine
element group
use semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8988275A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5524705B2 (enrdf_load_stackoverflow
Inventor
Hiroshi Takahashi
Koji Matsuo
Nobuyoshi Taguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP8988275A priority Critical patent/JPS5213789A/ja
Publication of JPS5213789A publication Critical patent/JPS5213789A/ja
Publication of JPS5524705B2 publication Critical patent/JPS5524705B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)
JP8988275A 1975-07-22 1975-07-22 Strain-gauge use semiconductor thine film element group Granted JPS5213789A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8988275A JPS5213789A (en) 1975-07-22 1975-07-22 Strain-gauge use semiconductor thine film element group

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8988275A JPS5213789A (en) 1975-07-22 1975-07-22 Strain-gauge use semiconductor thine film element group

Publications (2)

Publication Number Publication Date
JPS5213789A true JPS5213789A (en) 1977-02-02
JPS5524705B2 JPS5524705B2 (enrdf_load_stackoverflow) 1980-07-01

Family

ID=13983129

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8988275A Granted JPS5213789A (en) 1975-07-22 1975-07-22 Strain-gauge use semiconductor thine film element group

Country Status (1)

Country Link
JP (1) JPS5213789A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS5524705B2 (enrdf_load_stackoverflow) 1980-07-01

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