JPS52137284A - Sotorage target - Google Patents

Sotorage target

Info

Publication number
JPS52137284A
JPS52137284A JP5316476A JP5316476A JPS52137284A JP S52137284 A JPS52137284 A JP S52137284A JP 5316476 A JP5316476 A JP 5316476A JP 5316476 A JP5316476 A JP 5316476A JP S52137284 A JPS52137284 A JP S52137284A
Authority
JP
Japan
Prior art keywords
target
sotorage
changing
avoid
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5316476A
Other languages
Japanese (ja)
Inventor
Teruhide Nishikawa
Kitaro Yoshioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP5316476A priority Critical patent/JPS52137284A/en
Publication of JPS52137284A publication Critical patent/JPS52137284A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To avoid the seizing phenomenon by changing the surface potential of a target independently relative to the voltage of a substrate.
COPYRIGHT: (C)1977,JPO&Japio
JP5316476A 1976-05-12 1976-05-12 Sotorage target Pending JPS52137284A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5316476A JPS52137284A (en) 1976-05-12 1976-05-12 Sotorage target

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5316476A JPS52137284A (en) 1976-05-12 1976-05-12 Sotorage target

Publications (1)

Publication Number Publication Date
JPS52137284A true JPS52137284A (en) 1977-11-16

Family

ID=12935205

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5316476A Pending JPS52137284A (en) 1976-05-12 1976-05-12 Sotorage target

Country Status (1)

Country Link
JP (1) JPS52137284A (en)

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