JPS52136574A - Cvd apparatus - Google Patents

Cvd apparatus

Info

Publication number
JPS52136574A
JPS52136574A JP5345976A JP5345976A JPS52136574A JP S52136574 A JPS52136574 A JP S52136574A JP 5345976 A JP5345976 A JP 5345976A JP 5345976 A JP5345976 A JP 5345976A JP S52136574 A JPS52136574 A JP S52136574A
Authority
JP
Japan
Prior art keywords
cvd apparatus
pedestal
variation
reduce
film obtained
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5345976A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5549412B2 (enrdf_load_stackoverflow
Inventor
Itaru Yamanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP5345976A priority Critical patent/JPS52136574A/ja
Publication of JPS52136574A publication Critical patent/JPS52136574A/ja
Publication of JPS5549412B2 publication Critical patent/JPS5549412B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • C23C16/4582—Rigid and flat substrates, e.g. plates or discs
    • C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
JP5345976A 1976-05-10 1976-05-10 Cvd apparatus Granted JPS52136574A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5345976A JPS52136574A (en) 1976-05-10 1976-05-10 Cvd apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5345976A JPS52136574A (en) 1976-05-10 1976-05-10 Cvd apparatus

Publications (2)

Publication Number Publication Date
JPS52136574A true JPS52136574A (en) 1977-11-15
JPS5549412B2 JPS5549412B2 (enrdf_load_stackoverflow) 1980-12-11

Family

ID=12943435

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5345976A Granted JPS52136574A (en) 1976-05-10 1976-05-10 Cvd apparatus

Country Status (1)

Country Link
JP (1) JPS52136574A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008089627A (ja) * 2006-09-29 2008-04-17 Mitsuba Corp 車両用ホーン

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58165982U (ja) * 1982-04-30 1983-11-05 矢崎総業株式会社 雄型電気接続子
JPH01145060U (enrdf_load_stackoverflow) * 1988-03-30 1989-10-05
JPH0337769U (enrdf_load_stackoverflow) * 1989-08-23 1991-04-11
JPH0487176U (enrdf_load_stackoverflow) * 1990-11-30 1992-07-29

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5018471A (enrdf_load_stackoverflow) * 1973-05-31 1975-02-26

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5018471A (enrdf_load_stackoverflow) * 1973-05-31 1975-02-26

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008089627A (ja) * 2006-09-29 2008-04-17 Mitsuba Corp 車両用ホーン

Also Published As

Publication number Publication date
JPS5549412B2 (enrdf_load_stackoverflow) 1980-12-11

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