JPS52136001A - Method of adjusting dimensions of lines on photo mask - Google Patents

Method of adjusting dimensions of lines on photo mask

Info

Publication number
JPS52136001A
JPS52136001A JP5306776A JP5306776A JPS52136001A JP S52136001 A JPS52136001 A JP S52136001A JP 5306776 A JP5306776 A JP 5306776A JP 5306776 A JP5306776 A JP 5306776A JP S52136001 A JPS52136001 A JP S52136001A
Authority
JP
Japan
Prior art keywords
lines
photo mask
adjusting dimensions
dimensions
adjusting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5306776A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5624942B2 (cs
Inventor
Satoshi Takeuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dai Nippon Printing Co Ltd
Original Assignee
Dai Nippon Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dai Nippon Printing Co Ltd filed Critical Dai Nippon Printing Co Ltd
Priority to JP5306776A priority Critical patent/JPS52136001A/ja
Publication of JPS52136001A publication Critical patent/JPS52136001A/ja
Publication of JPS5624942B2 publication Critical patent/JPS5624942B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP5306776A 1976-05-10 1976-05-10 Method of adjusting dimensions of lines on photo mask Granted JPS52136001A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5306776A JPS52136001A (en) 1976-05-10 1976-05-10 Method of adjusting dimensions of lines on photo mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5306776A JPS52136001A (en) 1976-05-10 1976-05-10 Method of adjusting dimensions of lines on photo mask

Publications (2)

Publication Number Publication Date
JPS52136001A true JPS52136001A (en) 1977-11-14
JPS5624942B2 JPS5624942B2 (cs) 1981-06-09

Family

ID=12932469

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5306776A Granted JPS52136001A (en) 1976-05-10 1976-05-10 Method of adjusting dimensions of lines on photo mask

Country Status (1)

Country Link
JP (1) JPS52136001A (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5477070A (en) * 1977-12-01 1979-06-20 Fujitsu Ltd Production of photo mask

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5477070A (en) * 1977-12-01 1979-06-20 Fujitsu Ltd Production of photo mask

Also Published As

Publication number Publication date
JPS5624942B2 (cs) 1981-06-09

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