JPS52127351A - Automatic roughness detector - Google Patents

Automatic roughness detector

Info

Publication number
JPS52127351A
JPS52127351A JP4361876A JP4361876A JPS52127351A JP S52127351 A JPS52127351 A JP S52127351A JP 4361876 A JP4361876 A JP 4361876A JP 4361876 A JP4361876 A JP 4361876A JP S52127351 A JPS52127351 A JP S52127351A
Authority
JP
Japan
Prior art keywords
roughness detector
automatic
automatic roughness
moire
electric signals
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4361876A
Other languages
English (en)
Japanese (ja)
Other versions
JPS576045B2 (OSRAM
Inventor
Motoi Suwa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP4361876A priority Critical patent/JPS52127351A/ja
Publication of JPS52127351A publication Critical patent/JPS52127351A/ja
Publication of JPS576045B2 publication Critical patent/JPS576045B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP4361876A 1976-04-19 1976-04-19 Automatic roughness detector Granted JPS52127351A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4361876A JPS52127351A (en) 1976-04-19 1976-04-19 Automatic roughness detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4361876A JPS52127351A (en) 1976-04-19 1976-04-19 Automatic roughness detector

Publications (2)

Publication Number Publication Date
JPS52127351A true JPS52127351A (en) 1977-10-25
JPS576045B2 JPS576045B2 (OSRAM) 1982-02-03

Family

ID=12668817

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4361876A Granted JPS52127351A (en) 1976-04-19 1976-04-19 Automatic roughness detector

Country Status (1)

Country Link
JP (1) JPS52127351A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59157507A (ja) * 1983-02-28 1984-09-06 Matsushita Electric Works Ltd 形状欠陥検出装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5018062A (OSRAM) * 1973-06-18 1975-02-26

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5018062A (OSRAM) * 1973-06-18 1975-02-26

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59157507A (ja) * 1983-02-28 1984-09-06 Matsushita Electric Works Ltd 形状欠陥検出装置

Also Published As

Publication number Publication date
JPS576045B2 (OSRAM) 1982-02-03

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