JPS52125451U - - Google Patents

Info

Publication number
JPS52125451U
JPS52125451U JP3383676U JP3383676U JPS52125451U JP S52125451 U JPS52125451 U JP S52125451U JP 3383676 U JP3383676 U JP 3383676U JP 3383676 U JP3383676 U JP 3383676U JP S52125451 U JPS52125451 U JP S52125451U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3383676U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3383676U priority Critical patent/JPS52125451U/ja
Publication of JPS52125451U publication Critical patent/JPS52125451U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP3383676U 1976-03-19 1976-03-19 Pending JPS52125451U (xx)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3383676U JPS52125451U (xx) 1976-03-19 1976-03-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3383676U JPS52125451U (xx) 1976-03-19 1976-03-19

Publications (1)

Publication Number Publication Date
JPS52125451U true JPS52125451U (xx) 1977-09-24

Family

ID=28493243

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3383676U Pending JPS52125451U (xx) 1976-03-19 1976-03-19

Country Status (1)

Country Link
JP (1) JPS52125451U (xx)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5685834A (en) * 1979-12-17 1981-07-13 Nec Corp External appearance inspecting device for semiconductor substrate
JPS5745254A (en) * 1980-09-01 1982-03-15 Nippon Telegr & Teleph Corp <Ntt> Automatic detector for amount of silicon wafer worked

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5685834A (en) * 1979-12-17 1981-07-13 Nec Corp External appearance inspecting device for semiconductor substrate
JPS5745254A (en) * 1980-09-01 1982-03-15 Nippon Telegr & Teleph Corp <Ntt> Automatic detector for amount of silicon wafer worked

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