JPS52124679A - Transfer device of piece to be treated - Google Patents

Transfer device of piece to be treated

Info

Publication number
JPS52124679A
JPS52124679A JP3626377A JP3626377A JPS52124679A JP S52124679 A JPS52124679 A JP S52124679A JP 3626377 A JP3626377 A JP 3626377A JP 3626377 A JP3626377 A JP 3626377A JP S52124679 A JPS52124679 A JP S52124679A
Authority
JP
Japan
Prior art keywords
treated
piece
transfer device
transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3626377A
Other languages
English (en)
Japanese (ja)
Inventor
Jii Gaadeinia Jiyunia Beyaado
Ei Maningu Sutanree
Ii Miikusu Aasaa
Miyuushitsutsu Bera
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of JPS52124679A publication Critical patent/JPS52124679A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
JP3626377A 1976-04-13 1977-04-01 Transfer device of piece to be treated Pending JPS52124679A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US67660076A 1976-04-13 1976-04-13

Publications (1)

Publication Number Publication Date
JPS52124679A true JPS52124679A (en) 1977-10-19

Family

ID=24715162

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3626377A Pending JPS52124679A (en) 1976-04-13 1977-04-01 Transfer device of piece to be treated

Country Status (3)

Country Link
US (1) UST966009I4 (enrdf_load_stackoverflow)
JP (1) JPS52124679A (enrdf_load_stackoverflow)
FR (1) FR2348131A1 (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01271356A (ja) * 1988-04-25 1989-10-30 Somar Corp 薄膜剥離装置
JPH0586927U (ja) * 1992-05-06 1993-11-22 東洋製罐株式会社 物品搬送装置
WO1998047798A1 (fr) * 1997-04-24 1998-10-29 Kabushiki Kaisha Watanabe Shoko Machine-transfert a flux d'air
US6398464B1 (en) 1999-12-27 2002-06-04 Kabushiki Kaisha Watanabe Shoko Air stream transfer apparatus
JP2015009982A (ja) * 2013-07-02 2015-01-19 トヨタ自動車株式会社 搬送システム

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4916856A (en) 1984-03-07 1990-04-17 Bourgogne Pierre M Process for the automated growing of a group of plants and corresponding installation
US4710068A (en) 1986-09-15 1987-12-01 Reynolds Metals Company Air conveyor
DE8706380U1 (de) * 1987-05-05 1988-06-09 Frank, Gabriele, 6333 Braunfels Vorrichtung zum Schwebefördern
US5205991A (en) * 1991-07-30 1993-04-27 Corning Incorporated Manufacture of extruded ceramics
JP4396847B2 (ja) * 2004-12-22 2010-01-13 Ｓｍｃ株式会社 除電装置付きエア浮上装置及び該浮上装置における除電方法
US8248725B2 (en) * 2007-10-09 2012-08-21 Hitachi Global Storage Technologies, Netherlands B.V. System and method to electrically ground fluid dynamic bearings
CN103381965B (zh) * 2013-07-02 2016-02-03 深圳市华星光电技术有限公司 一种液晶面板的气浮式导向轮传送装置
US10332770B2 (en) * 2014-09-24 2019-06-25 Sandisk Technologies Llc Wafer transfer system
CN111439588A (zh) * 2019-01-16 2020-07-24 上海襄万机电科技有限公司 一种无接触的物料传送装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01271356A (ja) * 1988-04-25 1989-10-30 Somar Corp 薄膜剥離装置
JPH0586927U (ja) * 1992-05-06 1993-11-22 東洋製罐株式会社 物品搬送装置
WO1998047798A1 (fr) * 1997-04-24 1998-10-29 Kabushiki Kaisha Watanabe Shoko Machine-transfert a flux d'air
US6315501B1 (en) 1997-04-24 2001-11-13 Kabushiki Kaisha Watanabe Shoko Air stream particulate collecting transfer apparatus
US6398464B1 (en) 1999-12-27 2002-06-04 Kabushiki Kaisha Watanabe Shoko Air stream transfer apparatus
JP2015009982A (ja) * 2013-07-02 2015-01-19 トヨタ自動車株式会社 搬送システム

Also Published As

Publication number Publication date
UST966009I4 (en) 1978-01-03
FR2348131B1 (enrdf_load_stackoverflow) 1978-11-03
FR2348131A1 (fr) 1977-11-10

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