JPS5212396B2 - - Google Patents

Info

Publication number
JPS5212396B2
JPS5212396B2 JP48082639A JP8263973A JPS5212396B2 JP S5212396 B2 JPS5212396 B2 JP S5212396B2 JP 48082639 A JP48082639 A JP 48082639A JP 8263973 A JP8263973 A JP 8263973A JP S5212396 B2 JPS5212396 B2 JP S5212396B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP48082639A
Other languages
Japanese (ja)
Other versions
JPS4945352A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19722236074 external-priority patent/DE2236074C3/en
Application filed filed Critical
Publication of JPS4945352A publication Critical patent/JPS4945352A/ja
Publication of JPS5212396B2 publication Critical patent/JPS5212396B2/ja
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C23C14/0647—Boron nitride
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00—Stock material or miscellaneous articles
    • Y10S428/913—Material designed to be responsive to temperature, light, moisture

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Inorganic Insulating Materials (AREA)
  • Non-Adjustable Resistors (AREA)
  • Surface Treatment Of Glass (AREA)
JP48082639A 1972-07-22 1973-07-19 Expired JPS5212396B2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19722236074 DE2236074C3 (en) 1972-07-22 Chemically highly resistant material and process for the production of thin surface layers from this material

Publications (2)

Publication Number Publication Date
JPS4945352A JPS4945352A (en) 1974-04-30
JPS5212396B2 true JPS5212396B2 (en) 1977-04-06

Family

ID=5851400

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48082639A Expired JPS5212396B2 (en) 1972-07-22 1973-07-19

Country Status (4)

Country Link
US (1) US3916075A (en)
JP (1) JPS5212396B2 (en)
FR (1) FR2193886B1 (en)
GB (1) GB1431935A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54184197U (en) * 1978-06-16 1979-12-27
JPH0387563U (en) * 1989-12-18 1991-09-05

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51150057A (en) * 1975-06-18 1976-12-23 Matsushita Electric Ind Co Ltd Variable resistor
US4226932A (en) * 1979-07-05 1980-10-07 Gte Automatic Electric Laboratories Incorporated Titanium nitride as one layer of a multi-layered coating intended to be etched
US4321100A (en) * 1981-03-25 1982-03-23 The United States Of America As Represented By The Secretary Of The Army Method of joining boron nitride to a refractory
US4645621A (en) * 1984-12-17 1987-02-24 E. I. Du Pont De Nemours And Company Resistor compositions
GB8508338D0 (en) * 1985-03-29 1985-05-09 British Aerospace Application of stop-off coating
US4680243A (en) * 1985-08-02 1987-07-14 Micronix Corporation Method for producing a mask for use in X-ray photolithography and resulting structure
US5035940A (en) * 1988-09-19 1991-07-30 Rexham Corporation Aluminum-fluoropolymer laminate
US5075130A (en) * 1990-11-19 1991-12-24 The United States Of America As Represented By The Secretary Of The Army Surface modification of boron carbide to form pockets of solid lubricant
LU87988A1 (en) * 1991-08-08 1993-03-15 Europ Communities METHOD FOR PRODUCING A TI-B-N COATING ON A SUBSTRATE BY SPUTTING
US5403458A (en) * 1993-08-05 1995-04-04 Guardian Industries Corp. Sputter-coating target and method of use
DE102005030862B4 (en) * 2005-07-01 2009-12-24 Sintec Keramik Gmbh First wetting auxiliary material for an evaporator body, its use for preparing the evaporator surface of an evaporator body and an electrically heatable ceramic evaporator body

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3275915A (en) * 1966-09-27 Beta tantalum thin-film capacitors
US2156803A (en) * 1934-05-03 1939-05-02 Cooper Products Inc Lubricant
US2842837A (en) * 1956-04-17 1958-07-15 United States Steel Corp Method of working wire and a lubricant therefor
US3003885A (en) * 1960-02-01 1961-10-10 Union Carbide Corp Titanium diboride article
BE634012A (en) * 1961-10-03
US3256103A (en) * 1963-05-20 1966-06-14 Refractory article
US3437592A (en) * 1963-11-04 1969-04-08 Westinghouse Electric Corp Electrically conductive solid lubricant members and apparatus employing them
US3551247A (en) * 1968-01-29 1970-12-29 Norton Research Corp Laminated vacuum coated titanium structural material
US3575858A (en) * 1969-05-20 1971-04-20 Us Air Force Lubricating composition consisting of perarylated silanes and solid lubricant powders
US3841848A (en) * 1970-01-30 1974-10-15 Suwa Seikosha Kk HARD WATCH CASE COMPRISING TiN, T, AND AT LEAST ONE OF Mn, Al AND V
US3730507A (en) * 1971-01-18 1973-05-01 Union Carbide Corp Boron nitride base evaporation vessel having a surface coating of titanium-silicon thereon
US3824113A (en) * 1972-05-08 1974-07-16 Sherwood Refractories Method of coating preformed ceramic cores

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54184197U (en) * 1978-06-16 1979-12-27
JPH0387563U (en) * 1989-12-18 1991-09-05

Also Published As

Publication number Publication date
US3916075A (en) 1975-10-28
FR2193886B1 (en) 1977-05-13
FR2193886A1 (en) 1974-02-22
DE2236074A1 (en) 1974-02-07
GB1431935A (en) 1976-04-14
JPS4945352A (en) 1974-04-30
DE2236074B2 (en) 1976-06-16

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