JPS52122170A - Pressure sensor - Google Patents

Pressure sensor

Info

Publication number
JPS52122170A
JPS52122170A JP3953376A JP3953376A JPS52122170A JP S52122170 A JPS52122170 A JP S52122170A JP 3953376 A JP3953376 A JP 3953376A JP 3953376 A JP3953376 A JP 3953376A JP S52122170 A JPS52122170 A JP S52122170A
Authority
JP
Japan
Prior art keywords
pressure sensor
detecting
low cost
small size
elastic diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3953376A
Other languages
Japanese (ja)
Inventor
Sumitake Yoshida
Chikao Kenji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP3953376A priority Critical patent/JPS52122170A/en
Publication of JPS52122170A publication Critical patent/JPS52122170A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To accomplish small size and low cost of pressure sensor by photoelectrically transforming displacement of elastic diaphragm, and detecting which circuit simply constituted.
COPYRIGHT: (C)1977,JPO&Japio
JP3953376A 1976-04-07 1976-04-07 Pressure sensor Pending JPS52122170A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3953376A JPS52122170A (en) 1976-04-07 1976-04-07 Pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3953376A JPS52122170A (en) 1976-04-07 1976-04-07 Pressure sensor

Publications (1)

Publication Number Publication Date
JPS52122170A true JPS52122170A (en) 1977-10-14

Family

ID=12555672

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3953376A Pending JPS52122170A (en) 1976-04-07 1976-04-07 Pressure sensor

Country Status (1)

Country Link
JP (1) JPS52122170A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5717430U (en) * 1980-06-25 1982-01-29
JPS5784908U (en) * 1980-11-13 1982-05-26
JPS57122332A (en) * 1980-09-27 1982-07-30 Tadano Tekkosho:Kk Pressure sensor
JPS6021918U (en) * 1983-07-22 1985-02-15 株式会社　小金井製作所 pneumatic converter
KR100652296B1 (en) * 2000-12-28 2006-11-29 동부일렉트로닉스 주식회사 Apparatus for indicating ventilation state in a semiconductor manufacturing equipment
JP4636691B2 (en) * 1998-12-31 2011-02-23 キブロン・インコーポレイテッド・オイ Measuring device for measuring small forces and displacements

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5717430U (en) * 1980-06-25 1982-01-29
JPS57122332A (en) * 1980-09-27 1982-07-30 Tadano Tekkosho:Kk Pressure sensor
JPS5784908U (en) * 1980-11-13 1982-05-26
JPS6021918U (en) * 1983-07-22 1985-02-15 株式会社　小金井製作所 pneumatic converter
JP4636691B2 (en) * 1998-12-31 2011-02-23 キブロン・インコーポレイテッド・オイ Measuring device for measuring small forces and displacements
KR100652296B1 (en) * 2000-12-28 2006-11-29 동부일렉트로닉스 주식회사 Apparatus for indicating ventilation state in a semiconductor manufacturing equipment

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